ONIUM SALT, CHEMICALLY AMPLIFIED RESIST COMPOSITION, AND PATTERNING PROCESS
申请人:Shin-Etsu Chemical Co., Ltd.
公开号:US20200223796A1
公开(公告)日:2020-07-16
A novel onium salt of formula (1) and a chemically amplified resist composition comprising the same as a PAG are provided. When processed by photolithography using KrF or ArF excimer laser, EB or EUV, the resist composition has a high sensitivity and reduced acid diffusion and is improved in exposure latitude, MEF, and LWR.
HEMIACETAL COMPOUND, POLYMER, RESIST COMPOSITION, AND PATTERNING PROCESS
申请人:Shin-Etsu Chemical Co., Ltd.
公开号:US20160238930A1
公开(公告)日:2016-08-18
A polymer for resist use is obtainable from a hemiacetal compound having formula (1
a
) wherein R
1
is H, CH
3
or CF
3
, R
2
to R
4
each are H or a monovalent hydrocarbon group, X
1
is a divalent hydrocarbon group, ZZ designates a non-aromatic mono- or polycyclic ring of 4 to 20 carbon atoms having a hemiacetal structure, k
1
=0 or 1, and k
2
=0 to 3. A resist composition comprising the polymer displays controlled acid diffusion and low roughness during both positive and negative tone developments.
MONOMER, POLYMER, RESIST COMPOSITION, AND PATTERNING PROCESS
申请人:SHIN-ETSU CHEMICAL CO., LTD.
公开号:US20150323865A1
公开(公告)日:2015-11-12
A polymer for resist use is obtainable from a monomer having formula (1) wherein R
1
is H, CH
3
or CF
3
, R
2
and R
3
each are H or a monovalent hydrocarbon group, X
1
is a divalent hydrocarbon group, k
1
=0 or 1, and Z forms a 5 or 6-membered alicyclic ring. A resist composition comprising the polymer is shelf stable and displays a high dissolution contrast, controlled acid diffusion and low roughness during both alkaline development and organic solvent development.
Provided are a compound and a fragrance composition that are excellent in harmony with various other fragrance materials and can be blended to impart a natural and fresh floral feeling. The present invention provides a cyclopropane compound represented by Formula (I) and a fragrance composition containing a cyclopropane compound represented by Formula (I):
where R
1
is a methyl group and R
2
is a methyl group, or R
1
is a hydrogen atom and R
2
is an ethyl group.
NOVEL ONIUM SALT COMPOUND, RESIST COMPOSITION, AND PATTERN FORMING PROCESS
申请人:Shin-Etsu Chemical Co., Ltd.
公开号:US20160131972A1
公开(公告)日:2016-05-12
Sulfonium and iodonium salts of a carboxylate having an aromatic ring to which a nitrogen-containing alkyl or cyclic structure is attached are novel. The onium salt functions as an acid diffusion controlling agent in a resist composition, enabling to form a pattern of good profile with high resolution, improved MEF, LWR and DOF.