The invention relates to processes for producing and using amidoxime compounds with low trace metal impurities. The invention further relates to compositions comprising amidoxime compounds with low trace metal impurities, such compositions useful for cleaning or removing residues from semiconductor substrates and/or equipment.
本发明涉及生产和使用低微量
金属杂质的酰胺
肟化合物的方法。本发明还涉及包含低微量
金属杂质的酰胺
肟化合物的组合物,这种组合物可用于清洁或去除半导体基板和/或设备中的残留物。