nBu3P-Silber(I)-β-Diketonate: Synthese, Gasphasenuntersuchungen und Verwendung als CVD-Precursoren
作者:H. Schmidt、A. Jakob、T. Haase、K. Kohse-Höinghaus、S. E. Schulz、T. Wächtler、T. Gessner、H. Lang
DOI:10.1002/zaac.200500143
日期:2005.10
nBu3P-Silver(I)-β-Diketonates: Synthesis, Gas Phase Studies, and their Use as CVD-Precursors The synthesis of the silver(I) salts [AgX] (3a, X = acetylacetonate, acac; 3b, X = 1,1,1,5,5,5-hexafluoroacetylacetonate, hfac; 3c, X = 1,3-diphenyl-1,3-propanedionate, dipa) by the reaction of [AgNO3] (1) with H-X (2a, X = acac; 2b, X = hfac; 2c, X = dipa), or [Ag2O] (4) with 2b is reported. The addition of
nBu3P-Silver (I) -β-Diketonates:合成、气相研究及其作为 CVD 前体的用途银 (I) 盐 [AgX] 的合成(3a,X = 乙酰丙酮酸盐,acac;3b,X = 1 , 1,1,5,5,5-六氟乙酰丙酮酸盐, hfac; 3c, X = 1,3-diphenyl-1,3-propanedionate, dipa) 通过 [AgNO3] (1) 与 HX (2a, X = acac; 2b, X = hfac; 2c, X = dipa) 或 [Ag2O] (4) 与 2b。nBu3P (5) 与 3a - 3c 的添加比例分别为 1:1 和 2:1,得到磷烷银 (I) β-二酮酸盐 [(nBu3P) mAgX] (m = 1: 6a, X = acac; 6b, X = hfac; 6c, X = dipa.m = 2: 7a, X = acac; 7b, X