Embodiments in accordance with the present invention provide for norbornane-type ballast materials, norbornane-type photoactive compounds derived from such ballast materials and alkali-soluble positive-tone polymer compositions that encompass such norbornane-type photoactive compounds and one of a PBO or PNB resin.
本发明实施例提供了诺博烷型镇流材料,从这种镇流材料衍生出的诺博烷型光活性化合物以及包括这种诺博烷型光活性化合物和PBO或
PNB
树脂之一的碱溶性正向型聚合物组合物。