POLYMERIZABLE ANION-CONTAINING SULFONIUM SALT AND POLYMER, RESIST COMPOSITION, AND PATTERNING PROCESS
申请人:OHASHI Masaki
公开号:US20100099042A1
公开(公告)日:2010-04-22
A polymerizable anion-containing sulfonium salt having formula (1) is provided wherein R
1
is H, F, methyl or trifluoromethyl, R
2
, R
3
and R
4
are C
1
-C
10
alkyl, alkenyl or oxoalkyl or C
6
-C
18
aryl, aralkyl or aryloxoalkyl, or two of R
2
, R
3
and R
4
may bond together to form a ring with S, A is a C
2
-C
20
hydrocarbon group having cyclic structure, and n is 0 or 1. The sulfonium salt generates a very strong sulfonic acid upon exposure to high-energy radiation. A resist composition comprising a polymer derived from the sulfonium salt is also provided.
提供具有式(1)的可聚合含阴离子的亚砜盐,其中R1为H、F、甲基或三氟甲基,R2、R3和R4为C1-C10烷基、烯基或氧代烷基或C6-C18芳基、芳基烷基或芳基氧代烷基,或R2、R3和R4中的两个可以结合在一起形成与S的环,A为具有环状结构的C2-C20烃基团,n为0或1。该亚砜盐在暴露于高能辐射时生成非常强的磺酸。还提供了一种包含从该亚砜盐衍生的聚合物的抗蚀组合物。