申请人:Fukumoto Takashi
公开号:US20120148954A1
公开(公告)日:2012-06-14
Disclosed are an N-acyl-β-lactam derivative represented by the following general formula, from which a photoresist composition capable of controlling an acid diffusion length to be short is obtained; a polymer obtained by polymerizing the N-acyl-β-lactam derivative represented by the following general formula as one of starting materials; and a photoresist composition containing the polymer.
In the formula, R
1
represents a hydrogen atom, a methyl group, or a trifluoromethyl group; W represents an alkylene group or a cycloalkylene group; n represents 0 or 1; and each of R
2
, R
3
, R
4
, and R
5
independently represents a hydrogen atom, an alkyl group, a cyclic hydrocarbon group, or an acyloxy group, provided that 1) R
2
and R
3
, or R
4
and R
5
, may be connected to each other to form a substituted or unsubstituted ring which may have an oxygen atom at an arbitrary position, 2) R
3
and R
4
may be connected to each other to form a substituted or unsubstituted ring which may have an oxygen atom at an arbitrary position, and 3) all of R
2
, R
3
, R
4
, and R
5
are not a hydrogen atom at the same time.
本公开了一种N-酰基-β-内酰胺衍生物,其由以下通用式表示,从中可以获得一种能够控制酸扩散长度较短的光刻胶组合物;一种由将以下通用式表示的N-酰基-β-内酰胺衍生物聚合而成的聚合物作为起始材料之一;以及含有该聚合物的光刻胶组合物。在该式中,R1代表氢原子、甲基或三氟甲基基团;W代表烷基基团或环烷基基团;n代表0或1;而R2、R3、R4和R5中的每一个独立地代表氢原子、烷基基团、环烃基团或酰氧基团,前提是1)R2和R3,或R4和R5,可以连接在一起形成一个取代或未取代的环,该环在任意位置可能有一个氧原子,2)R3和R4可以连接在一起形成一个取代或未取代的环,该环在任意位置可能有一个氧原子,3)R2、R3、R4和R5中的所有基团不同时为氢原子。