申请人:Oh Jung-Hoon
公开号:US20090234155A1
公开(公告)日:2009-09-17
An acid generating agent used for chemically amplified resist compositions is provided, which agent is represented by the following formula (1):
wherein X represents a monocyclic or polycyclic hydrocarbon group having 3 to 30 carbon atoms, and having at least one hydrogen atom on the ring substituted by an alkyl or alkoxy group which and may be unsubstituted or substituted with a group selected from an ether group, an ester group, a carbonyl group, an acetal group, an epoxy group, a nitrile group and an aldehyde group, or by a perfluoroalkyl group, a hydroxyalkyl group, or a cyano group; R
6
is an alkyl group, an alkoxy group, or a heteroatom selected from the group consisting of N, S and F; m is an integer from 0 to 2; and A+ is an organic counterion.
提供用于化学增强抗蚀配方的酸发生剂,该剂由以下式(1)表示:其中X代表具有3至30个碳原子的单环或多环碳氢基团,并且环上至少有一个氢原子被烷基或烷氧基取代,该基团可以未取代或者取代为从醚基团、酯基团、羰基团、缩醛基团、环氧基团、腈基团和醛基团中选择的基团,或者被全氟烷基团、羟基烷基团或氰基团取代;R6是烷基团、烷氧基团或从N、S和F组成的杂原子中选择的杂原子;m是从0到2的整数;A+是有机对离子。