A polymer compound for a photoresist composition (a) having a high dissolution rate in a developing solution after exposure and (b) exhibiting little swelling during development. A tertiary alcohol derivative that is a raw material for the polymer compound. A tertiary alcohol that is an intermediate of the tertiary alcohol derivative. The tertiary alcohol is represented by formula (3):
wherein R
1
and R
2
individually represent a linear, branched or cyclic alkylene group having 2 to 9 carbon atoms, which may contain an oxygen atom, and wherein R
1
and R
2
may together form a ring with a carbon atom to which R
1
and R
2
are bonded.
一种聚合物化合物,用于具有曝光后在显影溶液中具有高溶解速率且在显影过程中表现出很少膨胀的光阻组合物(a)。该聚合物化合物的原料是一种
三级醇衍
生物。该
三级醇是
三级醇衍
生物的中间体。该
三级醇由公式(3)表示:其中R1和R2分别表示具有2至9个碳原子的线性、支链或环烷基,可以含有一个氧原子,并且R1和R2可以共同形成一个碳原子的环,R1和R2与该碳原子相连。