Fluorine-Containing Sulfonate Resin, Resist Composition and Pattern Formation Method
申请人:KATO Misugi
公开号:US20120322006A1
公开(公告)日:2012-12-20
A sulfonate resin according to the present invention has a repeating unit of the following general formula (3):
where X each independently represents a hydrogen atom or a fluorine atom; n represents an integer of 1 to 10; R represents a hydrogen atom, a halogen atom or a C
1
-C
3
alkyl or fluorine-containing alkyl group; J represents a divalent linking group; and M
+
represents a monovalent cation.
This sulfonate resin contains a sulfonic acid onium salt in a side chain thereof, with an anion moiety of the sulfonic acid onium salt fixed to the sulfonate resin, and thus functions as a resist resin with good resist characteristics such as DOF, LER, sensitivity and resolution.
根据本发明,磺酸盐树脂具有以下通用公式(3)的重复单元:其中X分别表示氢原子或氟原子;n表示1至10的整数;R表示氢原子、卤原子或C1-C3烷基或含氟烷基团;J表示二价连接基团;M+表示一价阳离子。这种磺酸盐树脂在侧链中含有磺酸盐鉮盐,磺酸盐鉮盐的阴离子部分固定在磺酸盐树脂上,因此作为具有良好抗性特性(如DOF、LER、灵敏度和分辨率)的抗性树脂。