申请人:Kinsho Takeshi
公开号:US20090239179A1
公开(公告)日:2009-09-24
A hydroxyl-containing monomer of formula (1) is provided wherein R
1
is H, F, methyl or trifluoromethyl, R
2
and R
3
are monovalent C
1
-C
15
hydrocarbon groups, or R
2
and R
3
may form an aliphatic ring. The monomers are useful for the synthesis of polymers which have high transparency to radiation of up to 500 nm and the effect of controlling acid diffusion so that the polymers may be used as a base resin to formulate radiation-sensitive resist compositions having a high resolution.
提供了一种含有羟基单体的化学式(1),其中R1为H、F、甲基或三氟甲基,R2和R3为一价的C1-C15烃基,或R2和R3可以形成脂肪环。这些单体可用于合成具有高透射性的聚合物,透射范围高达500纳米,并具有控制酸扩散的效果,因此这些聚合物可用作基础树脂,用于制定具有高分辨率的辐射敏感型光阻组成物。