Coating liquid for forming oxide, method for producing oxide film, and method for producing field-effect transistor
申请人:Saotome Ryoichi
公开号:US11069780B2
公开(公告)日:2021-07-20
A coating liquid for forming an oxide, the coating liquid including: A element, which is at least one alkaline earth metal; and B element, which is at least one selected from the group consisting of gallium (Ga), scandium (Sc), yttrium (Y), and lanthanoid, wherein when a total of concentrations of the A element is denoted by CA mg/L and a total of concentrations of the B element is denoted by CB mg/L, a total of concentrations of sodium (Na) and potassium (K) in the coating liquid is (CA+CB)/103 mg/L or less and a total of concentrations of chromium (Cr), manganese (Mn), iron (Fe), cobalt (Co), nickel (Ni), and copper (Cu) in the coating liquid is (CA+CB)/103 mg/L or less.
一种用于形成氧化物的涂层液,该涂层液包括A 元素,它至少是一种碱土金属;B 元素,至少选自镓(Ga)、钪(Sc)、钇(Y)和镧(Lanthanoid)组成的组中的一种,其中,当 A 元素的总浓度用 CA mg/L 表示,B 元素的总浓度用 CB mg/L 表示时,涂层液中钠(Na)和钾(K)的总浓度为(CA+CB mg/L)、涂层液中钠(Na)和钾(K)的总浓度为 (CA+CB)/103 mg/L 或更低,涂层液中铬(Cr)、锰(Mn)、铁(Fe)、钴(Co)、镍(Ni)和铜(Cu)的总浓度为 (CA+CB)/103 mg/L 或更低。