COMPOUND, RESIN, UNDERLAYER FILM FORMING MATERIAL FOR LITHOGRAPHY, COMPOSITION FOR FORMING UNDERLAYER FILM FOR LITHOGRAPHY, UNDERLAYER FILM FOR LITHOGRAPHY, RESIST PATTERN FORMING METHOD, CIRCUIT PATTERN FORMING METHOD, AND PURIFICATION METHOD
申请人:Mitsubishi Gas Chemical Company, Inc.
公开号:EP3327005A1
公开(公告)日:2018-05-30
A compound or a resin represented by the following formula (1).
(in formula (1), each X independently represents an oxygen atom, a sulfur atom, or an uncrosslinked state, each R1 is independently selected from the group consisting of a halogen group, a cyano group, a nitro group, an amino group, a hydroxyl group, a thiol group, a heterocyclic group, an alkyl group having 1 to 30 carbon atoms, an alkenyl group having 2 to 30 carbon atoms, an aryl group having 6 to 40 carbon atoms, and combinations thereof, in which the alkyl group, the alkenyl group and the aryl group optionally include an ether bond, a ketone bond or an ester bond, each R2 independently represents an alkyl group having 1 to 30 carbon atoms, an aryl group having 6 to 40 carbon atoms, an alkenyl group having 2 to 30 carbon atoms, a thiol group or a hydroxyl group, in which at least one R2 represents a group including a hydroxyl group or a thiol group, each m is independently an integer of 0 to 7 (in which at least one m is an integer of 1 to 7.), each p is independently 0 or 1, q is an integer of 0 to 2, and n is 1 or 2.)
下式(1)所代表的化合物或树脂。
(在式 (1) 中,每个 X 独立地代表氧原子、硫原子或未交联状态,每个 R1 独立地选自卤素基、氰基、硝基、氨基、羟基、硫醇基、杂环基、具有 1 至 30 个碳原子的烷基、具有 2 至 30 个碳原子的烯基、具有 6 至 40 个碳原子的芳基及其组合,其中烷基、烯基和芳基可选地包括醚键、酮键或酯键,每个 R2 独立地代表氧原子、硫原子或未交联状态,每个 R1 独立地选自卤素基、氰基、硝基、氨基、羟基、硫醇基、杂环基、具有 1 至 30 个碳原子的烷基、具有 2 至 30 个碳原子的烯基、具有 6 至 40 个碳原子的芳基及其组合、每个 R2 独立地代表具有 1 至 30 个碳原子的烷基、具有 6 至 40 个碳原子的芳基、具有 2 至 30 个碳原子的烯基、硫醇基或羟基,其中至少一个 R2 代表包括羟基或硫醇基在内的基团,每个 m 独立地为 0 至 7 的整数(其中至少一个 m 为 1 至 7 的整数。每个 p 独立地为 0 或 1,q 为 0 至 2 的整数,n 为 1 或 2)。