FLUOROCARBOXYLIC ACID-CONTAINING MONOMER, FLUOROCARBOXYLIC ACID-CONTAINING POLYMER, RESIST COMPOSITION AND PATTERNING PROCESS
申请人:Shin-Etsu Chemical Co., Ltd.
公开号:US20210341839A1
公开(公告)日:2021-11-04
A fluorocarboxylic acid-containing polymer comprising recurring units having formula (A1), but not acid labile group-containing recurring units is provided. A resist composition comprising the same offers a high sensitivity and is unsusceptible to nano-bridging or pattern collapse independent of whether it is of positive or negative tone.
.alpha.,.alpha.-Difluoro .beta.-Lactones and Their Thermal Decarboxylation to 1,1-Difluoroalkenes
作者:William R. Dolbier、Rogelio Ocampo、Rodrigo Paredes
DOI:10.1021/jo00122a007
日期:1995.9
Synthesis of 1,1-difluoroalkenes via α,α-difluoro-β-lactones
作者:Rogelio Ocampo、William R. Dolbier、Rodrigo Paredes
DOI:10.1016/s0022-1139(97)00134-6
日期:1998.2
A new method for the general synthesis of 1,1-difluoroalkenes from ketones is presented. The procedure involves initial condensation of a ketone with the difluoro Reformatsky reagent, hydrolysis to form the α,α-difluoro-β-hydroxy acids, followed by cyclization to make the novel α,α-difluoro-β-lactones. These are then thermally decarboxylated to form the 1,1-difluoroalkenes.