ACID DIFFUSION CONTROL AGENT, RADIATION-SENSITIVE RESIN COMPOSITION, RESIST PATTERN-FORMING METHOD, COMPOUND, AND PRODUCTION METHOD
申请人:JSR CORPORATION
公开号:US20150079520A1
公开(公告)日:2015-03-19
An acid diffusion control agent includes a compound represented by a formula (1), a compound represented by a formula (2) or both thereof. R
1
represents a hydrocarbon group comprising a monovalent alicyclic structure, or the like. R
2
and R
3
each independently represent a monovalent hydrocarbon group, or the like. R
4
and R
5
each independently represent a monovalent hydrocarbon group, or the like. R
6
and R
7
each independently represent a monovalent hydrocarbon group, or the like. R
8
represents a monocyclic heterocyclic group together with the ester group and with the carbon atom. n is an integer of 1 to 6. R
9
represents a monovalent hydrocarbon group, or the like. R
10
represents a monovalent hydrocarbon group having 1 to 10 carbon atoms. R
11
and R
12
each independently represent a monovalent hydrocarbon group, or the like. R
13
and R
14
each independently represent a monovalent hydrocarbon group, or the like.
一种酸扩散控制剂包括由公式(1)表示的化合物,由公式(2)表示的化合物或两者的混合物。其中,R1代表包括单价脂环结构或类似结构的烃基。R2和R3各自独立地代表单价烃基或类似物。R4和R5各自独立地代表单价烃基或类似物。R6和R7各自独立地代表单价烃基或类似物。R8代表与酯基和碳原子一起形成的单环杂环基。n为1至6的整数。R9代表单价烃基或类似物。R10代表具有1至10个碳原子的单价烃基。R11和R12各自独立地代表单价烃基或类似物。R13和R14各自独立地代表单价烃基或类似物。