CARBOXYLATE SALT, PHOTORESIST COMPOSITION INCLUDING THE SAME, AND METHOD OF FORMING PATTERN USING THE PHOTORESIST COMPOSITION
摘要:
Provided are a carboxylate salt represented by Formula 1, a photoresist composition including the same, and a pattern forming method using the same:
wherein A
11
, L
11
, L
12
, a11, a12, R
11
to R
13
, b13, n11, n12, and M
+
in Formula 1 are defined as described in the specification.
CARBOXYLATE, CARBOXYLIC ACID GENERATOR, RESIST COMPOSITION AND METHOD FOR PRODUCING RESIST PATTERN
申请人:SUMITOMO CHEMICAL COMPANY, LIMITED
公开号:US20210263416A1
公开(公告)日:2021-08-26
Disclosed are a carboxylate represented by formula (I), and a carboxylic acid generator and a resist composition, including the same:
wherein R
1
represents a fluorine atom or a fluorinated alkyl group having 1 to 4 carbon atoms; R
2
, R
3
and R
4
each independently represent a halogen atom, a fluorinated alkyl group having 1 to 4 carbon atoms or a hydrocarbon group having 1 to 12 carbon atoms, and —CH
2
— included in the hydrocarbon group may be replaced by —O— or —CO—; m2 and m3 represent an integer of 0 to 4, and m4 represents an integer of 0 to 5; and X
0
represents a hydrocarbon group having 1 to 72 carbon atoms which may have a substituent, and —CH
2
— included in the hydrocarbon group may be replaced by —O—, —S—, —CO— or —SO
2
—.
SALT, ACID GENERATOR, RESIST COMPOSITION AND METHOD FOR PRODUCING RESIST PATTERN
申请人:SUMITOMO CHEMICAL COMPANY, LIMITED
公开号:US20210255545A1
公开(公告)日:2021-08-19
Disclosed are a salt represented by formula (1), and an acid generator and a resist composition which include the same:
wherein R1 represents a fluorine atom or a fluorinated alkyl group; R2, R3 and R4 each represent a halogen atom, a fluorinated alkyl group or a hydrocarbon group; m2 and m3 represent an integer of 0 to 4; m4 represents an integer of 0 to 5; Q1 and Q2 each represent a fluorine atom or a perfluoroalkyl group; L1 represents a saturated hydrocarbon group, —CH2- included in the group may be replaced by —O— or —CO—, and a hydrogen atom included in the group may be substituted with a fluorine atom or a hydroxy group; Y1 represents a methyl group which may have a substituent or an alicyclic hydrocarbon group which may have a substituent.
PHOTOACID GENERATOR, PHOTORESIST COMPOSITION INCLUDING THE SAME, AND METHOD OF PREPARING THE PHOTOACID GENERATOR
申请人:Samsung Electronics Co., Ltd.
公开号:US20220171284A1
公开(公告)日:2022-06-02
Disclosed are a photoacid generator, a photoresist composition including the same, and a method of preparing the photoacid generator. The photoacid generator may include a compound represented by Formula 1:
wherein, in Formula 1, CY, A1, A2, and B are respectively described in the specification.
Monomer containing electron-withdrawing group and electron-donative group, and copolymer and proton-conductive membrane comprising same
申请人:JSR Corporation
公开号:EP1245554A1
公开(公告)日:2002-10-02
A monomer containing an electron-withdrawing group and an electron-donative group which can be easily controlled in the upper limit of the amount of a sulfonic acid , which impairs the mechanical properties of a copolymer, and can provide a sulfonated polymer that forms a proton-conductive membrane having a high proton conductivity over a wide temperature range, an excellent mechanical strength and an excellent proton conductivity and showing inhibited swelling in hot water and an aqueous solution of methanol, and a copolymer obtained from the monomer. A monomer containing an electron-withdrawing group and an electron-donative group represented by the following general formula (1) :
wherein Y represents a iodine atom, chlorine atom or bromine atom; X represents an electron-withdrawing group; B represents an electron-donative group; and Z represents an aryl group having a specific structure or a monovalent condensed ring hydrocarbon group such as naphthyl group.
一种含有一个抽电子基团和一个负电子基团的单体,该单体可以很容易地控制磺酸的用量上限,而磺酸会损害共聚物的机械性能,并可以提供一种磺化聚合物,该聚合物可以在很宽的温度范围内形成具有高质子传导性、优异的机械强度和优异的质子传导性的质子传导膜,并在热水和甲醇水溶液中表现出抑制溶胀的特性,以及由该单体得到的共聚物。一种单体,含有由下式通式(1)代表的一个电子吸收基团和一个电子疏导基团:
其中 Y 代表碘原子、氯原子或溴原子;X 代表抽电子基团;B 代表弃电子基团;Z 代表具有特定结构的芳基或一价缩合环烃基团,如萘基。
Polymer electrolyte membrane and solid polymer electrolyte fuel cell using same
A composite polymer electrolyte membrane is formed from a first polymer electrolyte comprising a sulfonated polyarylene polymer and a second polymer electrolyte comprising another hydrocarbon polymer electrolyte. In the first polymer electrolyte, 2-70 mol % constitutes an aromatic compound unit with an electron-attractive group in its principal chain, while 30-98 mol % constitutes an aromatic compound unit without an electron-attractive group in its principal chain. The second polymer electrolyte is a sulfonated polyether or sulfonated polysulfide polymer electrolyte. The composite polymer electrolyte membrane is formed from a matrix comprising the first polymer electrolyte selected from among sulfonated polyarylene polymers and having an ion exchange capacity in excess of 1.5 meq/g but less than 3.0 meq/g, which is supported on a reinforcement comprising the second polymer electrolyte having an ion exchange capacity in excess of 0.5 meq/g but less than 1.5 meq/g. The polymer electrolyte membrane comprises a polyarylene polymer sulfonated so that the Q value is within the range 0.09-0.18 C/cm
2
.