RADIATION-SENSITIVE RESIN COMPOSITION, METHOD FOR FORMING RESIST PATTERN, AND POLYMER AND COMPOUND
申请人:Osaki Hitoshi
公开号:US20130122426A1
公开(公告)日:2013-05-16
A radiation-sensitive resin composition that provides a resist coating film in a liquid immersion lithography process is provided, the radiation-sensitive resin composition being capable of exhibiting a great dynamic contact angle during exposure, whereby the surface of the resist coating film can exhibit a superior water draining property, and the radiation-sensitive resin composition being capable of leading to a significant decrease in the dynamic contact angle during development, whereby generation of development defects can be inhibited, and further shortening of a time period required for change in a dynamic contact angle is enabled. A radiation-sensitive resin composition including (A) a fluorine-containing polymer having a structural unit (I) that includes a group represented by the following formula (1), and (B) a radiation-sensitive acid generator.
提供一种辐射敏感的树脂组合物,可在液体浸没光刻工艺中提供抗蚀涂层膜,该辐射敏感的树脂组合物能够在曝光过程中展现出极大的动态接触角,从而使抗蚀涂层膜表面表现出优越的排水性能,并且该辐射敏感的树脂组合物能够在显影过程中引起动态接触角的显著降低,从而可以抑制显影缺陷的产生,并进一步缩短动态接触角变化所需的时间。该辐射敏感的树脂组合物包括(A)一种含氟聚合物,其具有包括以下公式(1)所表示的基团的结构单元(I),以及(B)一种辐射敏感的酸发生剂。