申请人:ARCH SPECIALITY CHEMICALS, INC.
公开号:US20040034160A1
公开(公告)日:2004-02-19
A polymer comprises an acetal-containing monomer unit having the general structure I and at least one of the fluorine-containing monomer units having the general structures II and III:
1
wherein R
1
, R
4
, R
5
and R
6
are each independently H, lower alkyl, CH
2
CO
2
R
10
, cyano, CH
2
CN, or halogen, wherein R
10
is any alkyl, cycloalkyl, aryl, arylalkyl, alkylenecycloalkyl, silyl or siloxy or linear or cyclic polysiloxane group; R
2
is CHR
11
R
12
where R
11
and R
12
are each independently H, lower alkyl, cycloalkyl or aryl; A is a substituted or unsubstituted alkylene, cycloalkylene, alkylenecycloalkylene, or alkylenearylene; and R
3
is linear, branched or cyclic fluoroalkyl group or SiR
13
R
14
R
15
where R
13
, R
14
, and R
15
are each independently alkyl, cycloalkyl, aryl, arylalkyl, alkylenecycloalkyl, silyl, siloxy, linear or cyclic polysiloxane or silsesquioxane alkyl group; B is an aryl, C(═O)—O—(CH
2
)
x
where x=
0−4
, lower alkyl, cycloalkyl, alkene cycloalkyl, silyl, siloxyl, or linear or cyclic polysiloxane group. R
7
is H or an acid sensitive group; R
8
and R
9
are each independently H or —CN group; and y=0−4 and the use of these polymers in radiation sensitive compositions for exposure to actinic radiation, especially radiation of 157 nm.
一种聚合物包括具有一般结构 I 的含缩醛单体单元和至少一种具有一般结构 II 和 III 的含氟单体单元:
1
其中 R
1
, R
4
, R
5
和 R
6
各自独立地为 H、低级烷基、CH
2
CO
2
R
10
氰基,CH
2
CN 或卤素,其中 R
10
是任何烷基、环烷基、芳基、芳烷基、亚烷基环烷基、硅烷基或硅氧基或线性或环状聚硅氧烷基团;R
2
是 CHR
11
R
12
其中 R
11
和 R
12
各自独立地为 H、低级烷基、环烷基或芳基; A 为取代或未取代的亚烷基、环烷基、亚烷基环烷基或亚烷基芳基;以及 R
3
是直链、支链或环状氟烷基或 SiR
13
R
14
R
15
其中 R
13
, R
14
和 R
15
各自独立地为烷基、环烷基、芳基、芳烷基、亚烷基环烷基、硅烷基、硅氧基、线性或环状聚硅氧烷或硅烷基烷基;B 为芳基、C(═O)-O-(CH)
2
)
x
其中 x 等于
0-4
、低级烷基、环烷基、烯环烷基、硅烷基、硅氧基或线性或环状聚硅氧烷基团。R
7
是 H 或酸敏感基团
8
和 R
9
y=0-4 以及这些聚合物在辐射敏感性组合物中的使用,用于暴露于辐射,特别是 157 纳米的辐射。