A radiation-sensitive resin composition includes a first polymer that includes a repeating unit having an acid-labile group and becomes alkali-soluble upon dissociation of the acid-labile group, and a radiation-sensitive acid-generating agent. The acid-labile group has a structure shown by a general formula (1). R
1
represents a methyl group or the like, R
2
represents a hydrocarbon group that forms a cyclic structure, R
3
represents a fluorine atom or the like, R
4
represents a carbon atom, and n
1
is an integer from 1 to 7.
一种辐射敏感
树脂组合物包括第一聚合物,其中包括具有酸敏感基团的重复单元,在酸敏感基团解离后变为碱溶解性,并且包括辐射敏感酸发生剂。酸敏感基团具有通式(1)所示的结构。R1代表甲基基团或类似物,R2代表形成环状结构的碳氢基团,R3代表
氟原子或类似物,R4代表碳原子,n1为1至7之间的整数。