BASIC COMPOUND, CHEMICALLY AMPLIFIED RESIST COMPOSITION, AND PATTERNING PROCESS
申请人:Hatakeyama Jun
公开号:US20120141938A1
公开(公告)日:2012-06-07
A chemically amplified resist composition comprising a base polymer, an acid generator, and an amine quencher in the form of a β-alanine, γ-aminobutyric acid or 5-aminovaleric acid derivative having an acid labile group-substituted carboxyl group has a high contrast of alkaline dissolution rate before and after exposure and forms a pattern of good profile at a high resolution, minimal roughness and wide focus margin.
Precursors to fluoroalkanol-containing olefin monomers and associated methods of synthesis and use
申请人:Breyta Gregory
公开号:US20050124827A1
公开(公告)日:2005-06-09
The invention provides alkene fluoroalkanol and fluorinated polyol precursors to fluoroalkanol-substituted α,β-unsaturated esters. The fluoroalkanol-substituted α,β-unsaturated esters are olefins that can be readily polymerized to provide fluoroalkanol-substituted polymers useful in lithographic photoresist compositions. Also provided are methods for synthesizing the alkene fluoroalkanol and fluorinated polyol precursors.
Precursors to fluoroalkanol-containing olefin monomers, and associated methods of synthesis and use
申请人:Breyta Gregory
公开号:US20050124828A1
公开(公告)日:2005-06-09
The invention provides alkene fluoroalkanol and fluorinated polyol precursors to fluoroalkanol-substituted αβ-unsaturated esters. The fluoroalkanol-substituted αβ-unsaturated esters are olefins that can be readily polymerized to provide fluoroalkanol-substituted polymers useful in lithographic photoresist compositions. Also provided are methods for synthesizing the alkene fluoroalkanol and fluorinated polyol precursors.
Processes for producing fluorine-containing 2,4-diols and their derivatives
申请人:Komata Takeo
公开号:US20050215836A1
公开(公告)日:2005-09-29
A process for producing a fluorine-containing 2,4-diol represented by the formula [4],
wherein R
1
represents a hydrogen atom or an acyclic or cyclic alkyl group having a carbon atom number of 1 to 7; R
2
represents an acyclic or cyclic alkyl group having a carbon atom number of 1 to 7, a phenyl group, or a substituted phenyl group; and R
1
and R
2
are optionally bonded to each other to form a ring, includes reducing a hydroxy ketone represented by the formula [3],
wherein R
1
and R
2
are defined as above, by hydrogen in the presence of a ruthenium catalyst.
RADIATION-SENSITIVE RESIN COMPOSITION, METHOD FOR FORMING A RESIST PATTERN, COMPOUND, AND POLYMER
申请人:ASANO Yuusuke
公开号:US20120156612A1
公开(公告)日:2012-06-21
A radiation-sensitive resin composition includes a first polymer that includes a repeating unit having an acid-labile group and becomes alkali-soluble upon dissociation of the acid-labile group, and a radiation-sensitive acid-generating agent. The acid-labile group has a structure shown by a general formula (1). R
1
represents a methyl group or the like, R
2
represents a hydrocarbon group that forms a cyclic structure, R
3
represents a fluorine atom or the like, R
4
represents a carbon atom, and n
1
is an integer from 1 to 7.