Ester compounds, polymers, resist compositions and patterning process
申请人:Shin-Etsu Chemical Co., Ltd.
公开号:US06284429B1
公开(公告)日:2001-09-04
A novel ester compound having an exo-form 2-alkylbicyclo[2.2.1]heptan-2-yl group as the protective group is provided as well as a polymer comprising units of the ester compound. The polymer is used as a base resin to formulate a resist composition having a higher sensitivity, resolution and etching resistance than conventional resist compositions.
ACID-DECOMPOSABLE ESTER COMPOUND SUITABLE FOR USE IN RESIST MATERIAL
申请人:——
公开号:US20020115874A1
公开(公告)日:2002-08-22
A novel ester compound having an exo-form 2-alkylbicyclo[2.2.1]heptan-2-yl ester as the acid-decomposable site is used as a dissolution regulator to formulate a resist composition having a high sensitivity, resolution, etching resistance and storage stability.