Novel Sulfonic Acid Salt and Derivative thereof, Photo-Acid Generator, and Process for Production of Sulfonic Acid Salt
申请人:Nagamori Masashi
公开号:US20110112306A1
公开(公告)日:2011-05-12
A fluorine-containing sulfonic acid salt or a compound having a fluorine-containing sulfonic acid group, either of which having a structure represented by the following general formula (1), is provided. Such a salt or compound can act as a suitable photo-acid generator, and can form a resist pattern having excellent sensitivity, resolution and mask-dependence.
[In general formula (1), R represents a substituted or unsubstituted linear or branched monovalent hydrocarbon group having 1 to 30 carbon atoms, a substituted or unsubstituted monovalent hydrocarbon group having 3 to 30 carbon atoms and a cyclic or a partially cyclic structure, a substituted or unsubstituted aryl group having 6 to 30 carbon atoms, or a substituted or unsubstituted monovalent heterocyclic organic group having 4 to 30 carbon atoms.]
提供一种含氟磺酸盐或含有含氟磺酸基团的化合物,其结构由下列通式(1)表示。这种盐或化合物可以作为合适的光酸发生剂,并且可以形成具有优异敏感度、分辨率和掩模依赖性的光阻图案。[在通式(1)中,R代表取代或未取代的具有1至30个碳原子的线性或支链一价碳氢基团,取代或未取代的具有3至30个碳原子且具有环状或部分环状结构的一价碳氢基团,取代或未取代的具有6至30个碳原子的芳基团,或取代或未取代的具有4至30个碳原子的一价杂环有机基团。]