申请人:AIR PRODUCTS AND CHEMICALS, INC.
公开号:EP1505050A1
公开(公告)日:2005-02-09
Disclosed herein is a fluorinated bridged carbocyclic compound that can be polymerized by itself or with at least one other ethylenically unsaturated monomer to provide a polymer. The polymer may be used, for example, within a sub-300 nm photoresist composition. Also disclosed is a method to make the bridged carbocyclic compound.
本文披露了一种氟化的桥联碳环化合物,可以单独聚合或与至少一种其他乙烯基不饱和单体一起聚合以提供聚合物。该聚合物可以用于例如在低于300纳米的光刻胶组合物中。还披露了一种制备桥联碳环化合物的方法。