Process for the production of halomethylating agents which are of low
申请人:Yeda Research and Development Co. Ltd.
公开号:US04568700A1
公开(公告)日:1986-02-04
There is provided a process for the production of halomethylating agents which are of low volatility; and a process for the halomethylation of aromatic substrates and aromatic polymeric substances. Among products produced from the halomethylaryl polymers there are anion exchange resins.
Photosensitive composition, pattern-forming method using the photosensitve composition and compound in the photosensitive composition
申请人:Wada Kenji
公开号:US20070141512A1
公开(公告)日:2007-06-21
A photosensitive composition containing a compound having a specific structure as described in the specification, a pattern-forming method using the photosensitive composition and the compound having a specific structure used in the photosensitive composition.
Alicyclic unsaturated compound, polymer, chemically amplified resist composition and method for forming pattern using said composition
申请人:Maeda Katsumi
公开号:US20060073408A1
公开(公告)日:2006-04-06
A noble alicyclic unsaturated compound represented by the general formula (1): wherein at least one of R
1
and R
2
is a fluorine atom or a fluorinated alkyl group; a polymer formed by the polymerization of a polymer precursor comprising the alicyclic compound. The polymer is useful, in the lithography using a light having a wavelength of 190 nm or less, as a chemically amplified resist which exhibits excellent transparency with respect to the light for use in exposure and also is excellent in the adhesion to a substrate and the resistance to dry etching.
通式(1)代表的高尚脂环族不饱和化合物: 其中至少一个 R
1
和 R
2
是氟原子或氟化烷基; 由包含该脂环族化合物的聚合物前体聚合而成的聚合物。在使用波长为 190 nm 或以下的光进行光刻时,该聚合物可用作化学放大抗蚀剂,它对用于曝光的光具有极佳的透明性,并且对基底具有极佳的附着力和耐干蚀刻性。
10.1016/j.molliq.2024.125254
作者:Gano, Marcin、Janus, Ewa、Cybulska, Krystyna
DOI:10.1016/j.molliq.2024.125254
日期:——
te [C4F9SO3]− were compared in terms of physicochemical properties and antimicrobial activity. The thermal properties including phase transition temperatures, thermal stability, specific rotation have been taken into consideration. Liquid pyrrolidinium salts with [NTf2]− and [NPf2]− anions, which can be classified as chiral ionic liquids, have also been compared in terms of density, dynamic viscosity