A negative resist composition comprising a sulfonium compound having formula (A) and a base polymer is provided. The resist composition exhibits a high resolution during pattern formation and forms a pattern with minimal LER.
                            提供一种负型光刻胶组合物,包括具有公式(A)的
磺化物化合物和基础聚合物。该光刻胶组合物在图案形成期间表现出高分辨率,并形成具有最小LER的图案。