申请人:SAN-APRO LTD.
公开号:US20160368879A1
公开(公告)日:2016-12-22
Provided is a non-ionic photoacid generator (A) expressed by general formula (1). R1 and R2 each independently represents an alkyl group having 1-18 carbons or a fluoroalkyl group having 1-18 carbons, an alkenyl group having 2-18 carbons, an alkynyl group having 2-18 carbons, an aryl group having 6-18 carbons, a silyl group, or the like; m and n respectively represent the number of R1s and R2s, each number being an integer from 0 to 3, and the total number (m+n) of R1s and R2s being an integer from 1 to 6. The m number of R1s and the n number of R2s may each be the same or different. R3 represents a hydrocarbon having 1-18 carbons wherein one part or all of the hydrogen may be substituted by fluorine.
提供的非离子光酸发生剂(A)由通式(1)表示。R1和R2分别独立表示具有1-18个碳原子的烷基基团或具有1-18个碳原子的氟烷基基团,具有2-18个碳原子的烯基基团,具有2-18个碳原子的炔基基团,具有6-18个碳原子的芳基基团,硅基团等;m和n分别表示R1和R2的数量,每个数字为0到3的整数,R1和R2的总数(m+n)为1到6的整数。R1的数量m和R2的数量n可以相同也可以不同。R3表示具有1-18个碳原子的碳氢化合物,其中氢的一部分或全部可以被氟取代。