UNDER LAYER FILM-FORMING COMPOSITION FOR IMPRINTS AND METHOD FOR FORMING PATTERN
申请人:FUJIFILM Corporation
公开号:US20160009946A1
公开(公告)日:2016-01-14
Provided is a composition for forming underlying layer for imprints, which is excellent in surface flatness and adhesiveness. The composition for forming underlying layer for imprints comprises (A) a resin having an ethylenic unsaturated group (P), and a cyclic ether group (T) selected from oxiranyl group and oxetanyl group, and having a weight-average molecular weight of 1000 or larger; and, (B) a solvent.
of allyl t-butyl peroxide in cyclohexane and tetrahydrofuran shows that an important induced decomposition of the peroxide occurs by the addition of radicals derived from the solvent, to the peroxide double bond, followed by an intramolecular homolytic displacement of the t-butoxyl group. Such a reaction is a 2,3-epoxypropanation of the solvent in which the initiator is decomposed. The reaction is