申请人:BASF SE
公开号:US11319332B2
公开(公告)日:2022-05-03
A process including bringing a solid substrate in contact with a compound of general formula (I), (II), (III), or (IV) in the gaseous state
where A is NR2 or OR with R being an alkyl group, an alkenyl group, an aryl group, or a silyl group,
E is NR or O,
n is 0, 1 or 2, m is 0, 1 or 2, and
R′ is hydrogen, an alkyl group, an alkenyl group, an aryl group, or a silyl group.
一种工艺,包括使固体基质与气态的通式(I)、(II)、(III)或(IV)化合物接触
其中 A 是 NR2 或 OR,R 是烷基、烯基、芳基或硅烷基、
E 是 NR 或 O、
n 是 0、1 或 2,m 是 0、1 或 2,以及
R′ 是氢、烷基、烯基、芳基或硅烷基。