Lactone-containing compounds having formula (1) are novel wherein R1 is H, F, methyl or trifluoromethyl, R2 and R3 are H or monovalent hydrocarbon groups, or R2 and R3 may together form an aliphatic hydrocarbon ring, R4 is H or CO2R5, R5 is a monovalent hydrocarbon group, W is CH2, O or S, and k1 is 3, 4 or 5. They are useful as monomers to produce polymers which are transparent to radiation s 500 nm. Radiation-sensitive resist compositions comprising the polymers as base resin exhibit excellent properties including resolution, LER, pattern density dependency and exposure margin.
具有式(1)的含
乳酮化合物是新型化合物,其中 R1 是 H、F、甲基或三
氟甲基,R2 和 R3 是 H 或单价烃基,或 R2 和 R3 可共同形成脂肪族烃环,R4 是 H 或 CO2R5,R5 是单价烃基,W 是
CH2、O 或 S,k1 是 3、4 或 5。它们可用作单体,生产出对 500 纳米波长辐射透明的聚合物。以这些聚合物为基础
树脂的辐射敏感抗蚀剂组合物具有优异的性能,包括分辨率、LER、图案密度依赖性和曝光余量。