The invention provides alkene fluoroalkanol and fluorinated polyol precursors to fluoroalkanol-substituted α,β-unsaturated esters. The fluoroalkanol-substituted α,β-unsaturated esters are olefins that can be readily polymerized to provide fluoroalkanol-substituted polymers useful in lithographic photoresist compositions. Also provided are methods for synthesizing the alkene fluoroalkanol and fluorinated polyol precursors.
本发明提供了烯烃
氟代醇和
氟代多元醇前体物,用于制备
氟代醇取代的α,β-不饱和酯。
氟代醇取代的α,β-不饱和酯是可以很容易地聚合以提供用于光刻胶组合物的
氟代醇取代聚合物的烯烃。还提供了合成烯烃
氟代醇和
氟代多元醇前体物的方法。