9-methacryloyloxy-4-oxatricyclo[5.2.1.0^2,6]decane-3-one | 473000-21-4

• 分子结构分类: 有机化合物 - 脂质和类脂质分子 - 异戊烯醇脂质
• 英文名称: 9-methacryloyloxy-4-oxatricyclo[5.2.1.0^2,6]decane-3-one
• 英文别名: 9-methacryloyloxy-4-oxatricyclo[5.2.1.02,6]decan-3-one；3-Oxooctahydro-4,7-methanoisobenzofuran-5-yl Methacrylate；(5-oxo-4-oxatricyclo[5.2.1.02,6]decan-8-yl) 2-methylprop-2-enoate
• CAS: 473000-21-4
• 化学式: C₁₃H₁₆O₄
• 分子量: 236.268
• InChiKey: HUBQXXVDMPTEHH-UHFFFAOYSA-N

计算性质

• 辛醇/水分配系数(LogP)：
  1.8
• 重原子数：
  17
• 可旋转键数：
  3
• 环数：
  3.0
• sp3杂化的碳原子比例：
  0.69
• 拓扑面积：
  52.6
• 氢给体数：
  0
• 氢受体数：
  4

反应信息

• 作为产物：
  描述：

  9-hydroxy-4-oxatricyclo[5.2.1.0^2,6]decane-3-one 、 8-hydroxy-4-oxatricyclo[5.2.1.0^2,6]decane-3-one 、 甲基丙烯酸甲酯 在 4-甲氧基苯酚 、 氧化二辛基锡 作用下， 反应 14.0h， 生成 9-methacryloyloxy-4-oxatricyclo[5.2.1.0^2,6]decane-3-one 、 8-methacryloyloxy-4-oxatricyclo[5.2.1.0^2,6]decane-3-one
  参考文献：
  名称：

  (METH)ACRYLATE ESTERS, STARTING ALCOHOLS FOR THE PREPARATION THEREOF, PROCESSES FOR PREPARING BOTH, POLYMERS OF THE ESTERS, CHEMICALLY AMPLIFIABLE RESIST COMPOSITIONS, AND METHOD FOR FORMING PATTERNS

  摘要：

  公开号：

  EP1352904B1

文献信息

• MONOMER HAVING ELECTRON-WITHDRAWING SUBSTITUENT AND LACTONE SKELETON, POLYMERIC COMPOUND, AND PHOTORESIST COMPOSITION
  申请人：Koyama Hiroshi

  公开号：US20100297555A1

  公开（公告）日：2010-11-25

  Disclosed is a monomer having an electron-withdrawing substituent and a lactone skeleton, represented by following Formula (1), wherein R a represents, e.g., a hydrogen atom or an alkyl group having 1 to 6 carbon atoms; R 1 represents, e.g., a halogen atom or an alkyl or haloalkyl group having 1 to 6 carbon atoms; “A” represents an alkylene group having 1 to 6 carbon atoms, oxygen atom, sulfur atom, or nonbonding; “m” denotes an integer of 0 to 8; Xs each represent an electron-withdrawing substituent; “n” denotes an integer of 1 to 9; and Y represents a bivalent organic group having 1 to 6 carbon atoms. The monomer is useful typically as a monomer component typically for a highly functional polymer, because, when the monomer is applied typically to a resist resin, the resin is satisfactory stable and resistant typically to chemicals, is highly soluble in organic solvents, and has improved hydrolyzability and/or solubility in water after hydrolysis.

  揭示了一种具有吸电子取代基和内酯骨架的单体，由以下式（1）表示，其中R代表，例如，氢原子或具有1至6个碳原子的烷基基团；R1代表，例如，卤素原子或具有1至6个碳原子的烷基或卤代烷基基团；“A”代表具有1至6个碳原子的烷基基团、氧原子、硫原子或非键合基团；“m”表示0至8的整数；Xs各自代表吸电子取代基；“n”表示1至9的整数；Y代表具有1至6个碳原子的二价有机基团。该单体通常用作高功能聚合物的单体组分，因为当该单体通常应用于抗蚀树脂时，树脂通常具有较高的稳定性和抗化学品性能，对有机溶剂具有较高的溶解性，并在水解后具有改善的水解性和/或水溶性。
• MONOMER HAVING N-ACYL CARBAMOYL GROUP AND LACTONE SKELETON, AND POLYMERIC COMPOUND
  申请人：DAICEL CORPORATION

  公开号：US20160060374A1

  公开（公告）日：2016-03-03

  Disclosed is a monomer containing an N-acylcarbamoyl group and a lactone skeleton. The monomer is exemplified by Formula (1): where R a is selected typically from hydrogen and C 1 -C 6 alkyl; R 1 is, independently in each occurrence, selected typically from halogen and optionally halogenated C 1 -C 6 alkyl; “A” is selected from C 1 -C 6 alkylene, oxygen, sulfur, and non-bond; m represents an integer of 0 to 8; X represents, independently in each occurrence, specific N-acylcarbamoyl; n represents an integer of 1 to 9; and Y represents a C 1 -C 6 divalent organic group.

  揭示了一种含有N-酰基氨酰基基团和内酯骨架的单体。该单体以式(1)为例，其中R通常选择自氢和C1-C6烷基；R1在每次出现时，通常选择自卤素和可选择卤代的C1-C6烷基；“A”选择自C1-C6亚烷基、氧、硫和非键合；m表示0到8的整数；X在每次出现时独立选择特定的N-酰基氨酰基；n表示1到9的整数；Y代表C1-C6二价有机基团。
• (Meth)acrylate esters, starting alcohols for the preparation thereof, processes for preparing both, polymers of the esters, chemically amplifiable resist compositions, and method for forming patterns
  申请人：——

  公开号：US20040063882A1

  公开（公告）日：2004-04-01

  The (meth)acrylate of the present invention is represented by the following formula (1). The (meth)acrylate can be produced by first producing a lactone by reducing an addition product obtained by the Diels-Alder reaction between 1,3-diene and maleic anhydride, and then hydrating the lactone to produce an alcohol followed by (meth)acrylation of the alcohol. A polymer produced by (co)polymerizing a monomer composition comprising the (meth)acrylate of the present invention is excellent in transparency, dry etching resistance, and solubility in organic solvents, and so it is preferably used as a resin for a chemically amplified resist composition. 1 wherein each of R 1 , R 2 , R 3 and R 4 represents a hydrogen atom, a methyl group or an ethyl group; either one of X 1 or X 2 represents a (meth)acryloyloxy group and the other represents a hydrogen atom; both A 1 and A 2 represent hydrogen atoms, or A 1 and A 2 form —O—, —CH 2 — or —CH 2 CH 2 —.

  本发明的（甲基）丙烯酸酯由以下公式（1）表示。可以通过首先通过还原1,3-二烯和马来酸酐之间的Diels-Alder反应得到的加成产物来制备内酯，然后水解内酯以产生醇，随后对醇进行（甲基）丙烯化来生产（甲基）丙烯酸酯。通过共聚合包含本发明的（甲基）丙烯酸酯的单体组成物制备的聚合物在透明度，干法蚀刻抗性和有机溶剂溶解性方面表现出色，因此最好将其用作化学放大抗蚀剂组合物的树脂。其中R1、R2、R3和R4中的每一个代表氢原子、甲基基团或乙基基团；X1或X2中的任意一个代表（甲基）丙烯酰氧基，另一个代表氢原子；A1和A2均表示氢原子，或A1和A2形成-O-，-CH2-或-CH2CH2-。
• (Meth)acrylate, raw material alcohol for the (meth)acrylate, method of producing the (meth)acrylate and the alcohol, polymer produced by polymerizing the (meth)acrylate, chemically amplified resist composition, and method of the formation of a pattern
  申请人：Kamon Yoshihiro

  公开号：US20050113538A1

  公开（公告）日：2005-05-26

  The (meth)acrylate of the present invention is represented by the following formula (1). The (meth)acrylate can be produced by first producing a lactone by reducing an addition product obtained by the Diels-Alder reaction between 1,3-diene and maleic anhydride, and then hydrating the lactone to produce an alcohol followed by (meth)acrylation of the alcohol. A polymer produced by (co)polymerizing a monomer composition comprising the (meth)acrylate of the present invention is excellent in transparency, dry etching resistance, and solubility in organic solvents, and so it is preferably used as a resin for a chemically amplified resist composition. wherein each of R 1 , R 2 , R 3 and R 4 represents a hydrogen atom, a methyl group or an ethyl group; either one of X 1 or X 2 represents a (meth)acryloyloxy group and the other represents a hydrogen atom; both A 1 and A 2 represent hydrogen atoms, or A 1 and A 2 form —O—, —CH 2 — or —CH 2 CH 2 —.

  本发明的（甲基）丙烯酸酯由以下公式（1）表示。可以通过首先通过还原1,3-二烯和马来酸酐之间的Diels-Alder反应得到的加成产物来生产内酯，然后使内酯水合生成醇，接着对醇进行（甲基）丙烯化来生产（甲基）丙烯酸酯。通过共聚或聚合包含本发明的（甲基）丙烯酸酯的单体组成的聚合物在透明度，干法蚀刻抵抗力和有机溶剂溶解性方面表现出色，因此最好用作化学增感抗蚀剂组成物的树脂。 其中，R1、R2、R3和R4中的每一个代表氢原子、甲基基团或乙基基团；X1或X2中的任意一个代表（甲基）丙烯酰氧基，另一个代表氢原子；A1和A2都代表氢原子，或者A1和A2形成-O-，-CH2-或-CH2CH2-。
• 5-Methylene-1,3-dioxolan-4-one derivatives, process for their production, polymers of the derivatives, resist compositions, and pattern formation process
  申请人：——

  公开号：US20040248031A1

  公开（公告）日：2004-12-09

  The 5-methylene-1,3-dioxolan-4-one derivative of the present invention is represented by the formula (1) indicated below, and it is a novel monomer from which a homopolymer and a copolymer excellent in light transparency and heat stability are obtained. Moreover, the polymer obtained by (co)polymerizing a monomer composition comprising the derivative represented by the formula (1) indicated below is excellent in the resist performance such as sensitivity, resolution and dry etching resistance, and solubility in an organic solvent, also having little line edge roughness, and thus it is preferably used as a resin for a resist composition. 1 wherein R 1 represents a bridged cyclic hydrocarbon group containing 4 to 16 carbon atoms, or a linear or branched alkyl group containing 1 to 6 carbon atoms which has a bridged cyclic hydrocarbon group containing 4 to 16 carbon atoms as a substituent; R 2 represents a hydrogen atom, or a linear or branched alkyl group containing 1 to 6 carbon atoms; or R 1 and R 2 represent a bridged cyclic hydrocarbon group containing 4 to 16 carbon atoms together with the carbon atom to which they are bound, provided that the alkyl group and the bridged cyclic hydrocarbon group may have at least one substituent selected from a group consisting of a linear or branched alkyl group containing 1 to 6 carbon atoms which may be optionally substituted, a hydroxy group, a carboxy group, an acyl group containing 2 to 6 carbon atoms, an alkoxy group containing 1 to 6 carbon atoms, and a carboxy group esterified with an alcohol containing 1 to 6 carbon atoms.

  本发明的5-亚甲基-1,3-二氧杂环戊酮衍生物的化学式如下所示，是一种新型单体，可制备出具有优异光透明度和热稳定性的均聚物和共聚物。此外，通过聚合由下式表示的衍生物组成的单体混合物得到的聚合物具有优异的感光性、分辨率、干法蚀刻抗性和有机溶剂溶解性，同时具有较小的线边粗糙度，因此它可作为光刻胶组分的树脂。其中，R1代表含有4到16个碳原子的桥环烃基，或含有4到16个碳原子的桥环烃基作为取代基的线性或支链烷基，R2代表氢原子，或含有1到6个碳原子的线性或支链烷基，或R1和R2与它们所连接的碳原子一起代表含有4到16个碳原子的桥环烃基，前提是烷基和桥环烃基可以具有至少一个选自以下一组的取代基：含有1到6个碳原子的线性或支链烷基（可以选择性地被取代）、羟基、羧基、含有2到6个碳原子的酰基、含有1到6个碳原子的烷氧基和含有1到6个碳原子的醇酯化的羧基。