A radiation-sensitive resin composition comprising an acid-labile group-containing resin obtained by living radical polymerization having a specific structure which is insoluble or scarcely soluble in alkali, but becomes alkali soluble by the action of an acid, and a photoacid generator, wherein the ratio of weight average molecular weight to number average molecular weight (weight average molecular weight/number average molecular weight) of the acid-labile group-containing-resin is smaller than 1.5.
一种辐射敏感
树脂组合物,包括一种通过活自由基聚合获得的具有特定结构的含酸基团
树脂,该
树脂不溶于碱或几乎不溶于碱,但在酸的作用下可溶于碱,还包括一种光酸发生器,其中含酸基团
树脂的重量平均分子量与数量平均分子量之比(重量平均分子量/数量平均分子量)小于 1.5。