Actinic ray-sensitive or radiation-sensitive resin composition, actinic ray-sensitive or radiation-sensitive film, mask blank including actinic ray-sensitive or radiation-sensitive film, pattern forming method, and method for manufacturing
申请人:FUJIFILM Corporation
公开号:US10928727B2
公开(公告)日:2021-02-23
According to the present invention, an actinic ray-sensitive or radiation-sensitive resin composition including a compound (A) whose dissolution rate in an alkali developer decreases by the action of an acid, a hydrophobic resin (B), and a resin (C) having an aromatic ring, as well as a film, a mask blank, a pattern forming method, and a method for manufacturing an electronic device, each using the composition, are provided.
根据本发明,提供了一种光敏或辐射敏感树脂组合物,其中包括在酸的作用下在碱显影剂中的溶解速率会降低的化合物(A)、疏水性树脂(B)和具有芳香环的树脂(C),以及使用该组合物的薄膜、掩膜坯、图案形成方法和电子设备制造方法。