申请人:AMERICAN CYANAMID COMPANY
公开号:EP0231922A2
公开(公告)日:1987-08-12
Polymers are disclosed comprising a poly(vinyl alcohol) backbone with the following groups or combination of groups bound to the backbone:
(A) (substituted alkyl)benzoyl groups; or
(B) (substituted alkyl)benzoyl groups, and (vinyl)benzoyl groups; or
(C) (substituted alkyl)benzoyl groups, and (halo) benzoyl groups or (2-carboxy-3,4,5,6-tetrachloro) benzoyl groups;
(D) (substituted alkyl)benzoyl groups, (vinyl)benzoyl groups, and (halo)benzoyl groups or (2-carboxy-3,4,5,6-tetrachloro)benzoyl groups;
(E) (vinyl)benzoyl groups, and (halo)benzoyl groups or (2-carboxy-3,4,5,6-tetrachloro) benzoyl groups; or
(F) (halo)benzoyl groups.
Each of these polymers can optionally contain, bound to the poly(vinyl alcohol) backbone, (trialkylsily) benzoyl groups.
The benzoyl groups are randomly bound to the poly(vinyl alcohol) by ester linkages. Residual pendant hydroxy groups remain after the attachment of the benzoyl groups.
Also disclosed are the use of these polymers as radiation sensitive resists, such as, for example, x-ray and/or E-beam resists.
已公开的聚合物由聚(乙烯醇)骨架组成,骨架上结合有以下基团或基团组合:
(A) (取代的烷基)苯甲酰基团;或
(B) (取代的烷基)苯甲酰基团和(乙烯基)苯甲酰基团;或
(C) (取代的烷基)苯甲酰基和(卤代)苯甲酰基或(2-羧基-3,4,5,6-四氯)苯甲酰基;
(D) (取代烷基)苯甲酰基、(乙烯基)苯甲酰基和(卤代)苯甲酰基或 (2-羧基-3,4,5,6-四氯)苯甲酰基;
(E) (乙烯基)苯甲酰基和(卤代)苯甲酰基或(2-羧基-3,4,5,6-四氯)苯甲酰基;或
(F) (卤代)苯甲酰基。
这些聚合物中的每一种都可以选择含有与聚(乙烯醇)骨架结合的(三烷基)苯甲酰基。
苯甲酰基通过酯键与聚乙烯醇随机结合。连接苯甲酰基后,残留的悬垂羟基仍然存在。
还公开了这些聚合物作为辐射敏感抗蚀剂的用途,例如 X 射线和/或电子束抗蚀剂。