RESIST COMPOSITION, METHOD OF FORMING RESIST PATTERN, COMPOUND, AND ACID GENERATOR
申请人:TOKYO OHKA KOGYO CO., LTD.
公开号:US20180149973A1
公开(公告)日:2018-05-31
A resist composition including a base component which exhibits changed solubility in a developing solution under action of acid, and a compound (B1) having an anion moiety and a cation moiety and being represented by general formula (b1) (wherein R
01
to R
014
each independently represents a hydrogen atom or a hydrocarbon group which may have a substituent, or two or more of R
01
to R
014
may be mutually bonded to form a ring structure, provided that at least two of R
01
to R
014
are mutually bonded to form a ring structure, and at least one of R
01
to R
014
has an anion group, and the anion moiety as a whole forms an anion having a valency of n; n represents an integer of 1 or more; represents an integer of 1 or more; and M
m+
represents an organic cation having a valency of m).
一种抗蚀组合物,包括在酸的作用下在显影溶液中表现出改变溶解度的基础组分,以及一种具有阴离子基团和阳离子基团的化合物(B1),其由一般式(b1)表示(其中R01至R014分别独立地表示氢原子或可能具有取代基的碳氢基团,或者R01至R014中的两个或两个以上可能相互键合形成环结构,前提是至少两个R01至R014相互键合形成环结构,至少一个R01至R014具有阴离子基团,整体上阴离子基团形成带有价数n的阴离子;n表示1或更多的整数;表示1或更多的整数;Mm+表示具有价数m的有机阳离子)。