In one preferred embodiment, polymers are provided that comprise a structure of the following Formula (I):
Photoresists that comprises such polymers also are provided.
在一个首选实施例中,提供了包含以下化学式(I)结构的聚合物:
还提供了包含这种聚合物的光刻胶。
SALT AND PROCESS FOR PRODUCING ACID GENERATOR
申请人:YOSHIDA Isao
公开号:US20110201823A1
公开(公告)日:2011-08-18
A salt represented by the formula (I0):
wherein Q
1
and Q
2
each independently represent a fluorine atom or a C1-C6 perfluoroalkyl group, L
1
represents a divalent C1-C17 hydrocarbon group in which one or more —CH
2
— can be replaced by —O— or —CO—, m represents 1 or 2, and Z
m+
represents m-valent organic or inorganic cation.
BASIC COMPOUND, CHEMICALLY AMPLIFIED RESIST COMPOSITION, AND PATTERNING PROCESS
申请人:Hatakeyama Jun
公开号:US20120141938A1
公开(公告)日:2012-06-07
A chemically amplified resist composition comprising a base polymer, an acid generator, and an amine quencher in the form of a β-alanine, γ-aminobutyric acid or 5-aminovaleric acid derivative having an acid labile group-substituted carboxyl group has a high contrast of alkaline dissolution rate before and after exposure and forms a pattern of good profile at a high resolution, minimal roughness and wide focus margin.
SALT, RESIN, RESIST COMPOSITION AND METHOD FOR PRODUCING RESIST PATTERN
申请人:SUMITOMO CHEMICAL COMPANY, LIMITED
公开号:US20160052877A1
公开(公告)日:2016-02-25
A salt represented by the formula (I);
wherein Q
1
and Q
2
each independently represent a fluorine atom or a C
1
to C
6
perfluoroalkyl group, L
b1
represents a single bond or a divalent C
1
to C
24
saturated hydrocarbon groupwhere a methylene group may be replaced by an oxygen atom or a carbonyl group and where a hydrogen atom may be replaced by a hydroxyl group or a fluorine atom, and Y represents a hydrogen atom, a fluorine atom, or an optionally substituted C
3
to C
18
alicyclic hydrocarbon groupwhere a methylene group may be replaced by an oxygen atom, a carbonyl group or a sulfonyl group; and Ar represents a divalent C
6
to C
20
aromatic hydrocarbon group, and Z
+
represents an organic sulfonium cation or an organic iodonium cation.
SALT, ACID GENERATOR, PHOTORESIST COMPOSITION, AND METHOD FOR PRODUCING PHOTORESIST PATTERN
申请人:SUMITOMO CHEMICAL COMPANY, LIMITED
公开号:US20160200702A1
公开(公告)日:2016-07-14
A salt represented by the formula (I):
wherein
R
1
represents a C1 to C12 alkyl group in which a methylene group can be replaced by an oxygen atom or a carbonyl group;
Q
1
and Q
2
each independently represent a fluorine atom or a C1 to C6 perfluoroalkyl group;
A
1
represents a lactone ring-containing group which has 4 to 24 carbon atoms;
R
2
represents an acid-labile group; and
“m” represents an integer of 0 to 3.