Novel compound, polymer, resist composition, and patterning process
申请人:Hasegawa Koji
公开号:US20050014092A1
公开(公告)日:2005-01-20
There is disclosed a polymer containing at least a repeating unit represented by the following general formula (1), and the resist composition containing the polymer as a base resin, especially a chemically amplified resist composition. There can be provided a resist composition which has etching resistance in a practical use level, and is excellent in an adhesion property with a substrate and an affinity with a developer, and has a sensitivity and resolving power which is far excellent compared with a conventional one, wherein swelling is small at the time of development, especially for photolithography which uses a high-energy beam as a light source, and especially be provided a chemically amplified resist composition.
EPOXYSILANES, PROCESSES FOR THEIR MANUFACTURE AND CURABLE COMPOSITIONS CONTAINING SAME
申请人:Momentive Performance Materials Inc.
公开号:EP2137198B1
公开(公告)日:2016-05-18
Epoxysilanes, processes for their manufacture and curable compositions containing same
申请人:Su Shiu-Chin H.
公开号:US20080221238A1
公开(公告)日:2008-09-11
Epoxysilanes are provided which contain at least one epoxy group, at least one hydrolyzable silyl group and one or more linkages containing a carbonyl group bonded to heteroatoms selected from the group consisting of oxygen, sulfur and nitrogen with at least one such heteroatom being nitrogen, there being no such linkage in which both an epoxy group and hydrolyzable silyl group are directly or indirectly bonded to the same nitrogen heteroatom in the linkage.
METHOD FOR PRODUCING EPOXY COMPOUND
申请人:Arakawa Chemical Industries, Ltd.
公开号:US20140073806A1
公开(公告)日:2014-03-13
To provide a method for producing an epoxy compound having fewer residual quaternary salt compound by removing the quaternary salt compound from an organic solution containing an epoxy compound and the quaternary salt compound.
A method for producing an epoxy compound comprising the following step 1, step 2, and step 3:
step 1: a step in which in a mixture liquid containing an olefin compound, an aqueous hydrogen peroxide solution, a quaternary salt compound, a heteropoly acid, and an organic solvent, the olefin compound is subjected to the oxidation reaction to obtain an organic solution (A) containing an epoxy compound,
step 2: a step in which an aqueous inorganic alkali solution is allowed to contact with the organic solution (A) to obtain an organic solution (B) containing the epoxy compound, and
step 3: a step in which an acidic aqueous solution containing a polymer having at least one functional group selected from the group consisting of a carboxyl group and a sulfonic acid group is allowed to contact with the organic solution (B) to obtain an organic solution (C) containing the epoxy compound.