The Reactions of Perfluoronitriles with Grignard Reagents<sup>1</sup>
作者:E. T. McBee、O. R. Pierce、D. D. Meyer
DOI:10.1021/ja01609a035
日期:1955.2
Polycyclic fluoroalkanes
申请人:E. I du Pont de Nemours and Company
公开号:US07084314B1
公开(公告)日:2006-08-01
Polycyclic fluoroalkanes that are highly transparent to UV wavelengths ranging from about 190 nm to 260 nm are provided. The polycyclic fluoroallkanes are suitable for use in a variety of applications, particularly in the vacuum UV and deep UV region of the electromagnetic spectrum. For example, the polycyclic fluoroalkanes are useful in optical couplants, optical cements, optical elements, optical inspection media for semiconductor wafers and devices, and immersion photolithography, particularly at 193 and 248 nm exposure wavelength.