申请人:Rohm and Haas Electronic Materials LLC
公开号:US10794866B2
公开(公告)日:2020-10-06
Acoustic wave sensors comprise: a piezoelectric layer, first and second electrodes arranged with the piezoelectric layer in a piezoelectric transducer circuit; and a polymeric sensing layer for adsorbing a gas-phase analyte, the adsorption of which analyte causes a change in resonant frequency of the piezoelectric transducer circuit, wherein the polymeric sensing layer comprises: (a) a polymer chosen from substituted or unsubstituted: polyarylenes comprising the reaction product of monomers comprising a first monomer comprising an aromatic acetylene group and a second monomer comprising a cyclopentadienone group; polyamides; polypyrazoles; or novolacs; or a cured product thereof; (b) a polymer chosen from substituted or unsubstituted: polyamic acids; or polyamic acid-polyimide copolymers; (c) a polymer formed from one or more monomers comprising a monomer comprising a polar group-substituted arylcyclobutene group, or a cured product thereof; or (d) a polymer comprising polymerized units of a monomer chosen from substituted or unsubstituted: maleimides; or norbomenes; or a cured product thereof. The acoustic wave sensors and methods of using such sensors find particular applicability in the sensing of gas-phase analytes.
声波传感器包括:压电层、与压电层一起布置在压电换能器电路中的第一和第二电极;以及用于吸附气相分析物的聚合物传感层,分析物的吸附导致压电换能器电路的共振频率发生变化,其中聚合物传感层包括:(a)选自取代或未取代的聚合物;(b)用于吸附气相分析物的聚合物;(c)用于吸附气相分析物的聚合物;(d)用于吸附气相分析物的聚合物;(e)用于吸附气相分析物的聚合物;(f)用于吸附气相分析物的聚合物;(g)用于吸附气相分析物的聚合物:聚芳香族,包括由包含芳香族乙炔基团的第一单体和包含环戊二烯酮基团的第二单体组成的单体的反应产物;聚酰胺;聚吡唑;或酚醛树脂;或其固化产物; (b) 选自取代的或未取代的聚氨基甲酸酯;或聚氨基甲酸酯-聚酰亚胺共聚物;(c)由一种或多种单体形成的聚合物,该单体包含由极性基团取代的芳基环丁烯基团组成的单体,或其固化产物;或(d)包含选自取代或未取代的单体的聚合单元的聚合物:马来酰亚胺;或诺贝梅烯;或其固化产物。声波传感器和使用这种传感器的方法特别适用于气相分析物的传感。