申请人:LEE Jae-Woo
公开号:US20090155714A1
公开(公告)日:2009-06-18
A photosensitive compound whose size is smaller than conventional polymer for photoresist, and which has well-defined (uniform) structure, and a photoresist composition including the same are disclosed. The photosensitive compound represented by the following formula. Also, the present invention provides a photoresist composition comprising 1 to 85 wt % (weight %) of the photosensitive compound; 0.05 to weight parts of a photo-acid generator with respect to 100 weight parts of the photosensitive compound; and 10 to 5000 weight parts of an organic solvent.
In the formula, n is 0 or 1, x is 1, 2, 3, 4 or 5, y is 2, 3, 4, 5 or 6, z is 0, 1, 2, 3 or 4, R, R′ and R″ are independently hydrocarbon group of 1 to 30 carbon atoms, preferably 2 to 20 carbon atoms, and R′″ is a hydrogen atom or hydrocarbon group of 1 to 30 carbon atoms, preferably 2 to 20 carbon atoms.
本发明揭示了一种比传统光刻胶更小的大小,具有明确定义(均匀)结构的光敏化合物,以及包括该光敏化合物的光刻胶组合物。该光敏化合物由以下公式表示。此外,本发明提供了一种光刻胶组合物,包括1至85重量%(重量%)的光敏化合物;相对于100重量部的光敏化合物0.05至重量份的光酸发生剂;以及10至5000重量部的有机溶剂。在公式中,n为0或1,x为1、2、3、4或5,y为2、3、4、5或6,z为0、1、2、3或4,R、R'和R"分别为1至30碳原子的烃基,优选为2至20碳原子,R'"为氢原子或1至30碳原子的烃基,优选为2至20碳原子。