(CF3)2CF(CF2CF2)nCHCH2, with ozone in the first stage, followed by the oxidation with hydrogen peroxide to the perfluorocarboxylic acids, were determined. The effects of temperature and time on the conversion of perfluoroalkylethenes during the oxidation with ozone were studied. In the second stage, the selectivity of transformation (of each homologue) to the perfluorocarboxylic acid in relation to the theoretical
Window member for chemical mechanical polishing and polishing pad
申请人:JSR Corporation
公开号:EP1306163A1
公开(公告)日:2003-05-02
An object of the present invention is to provide a window member (12) for chemical mechanical polishing, which is excellent in antifouling property and transparency and is excellent in anti-scratching and, further, can easily perform detection of a polishing endpoint of the surface of a semiconductor wafer (4) by passing a light for endpoint detection, in polishing of a semiconductor wafer (4) using an optical endpoint detecting apparatus (6) and also to a polishing pad (1). A window member (12) for chemical mechanical polishing of the present invention is provided with a substrate part (12a) (comprised of polyurethane resin and the like), which is transparent partly at least, an antifouling resin layer (12b) formed on at least one side of the substrate part (12a). This antifouling resin layer (12b) is preferably comprised of a fluorine-based polymer having a polysiloxane segment in a main chain.
An object of the invention is to provide an electrode catalyst layer of a solid polymer electrolyte membrane-electrode assembly expressing excellent balance between water retention and drainage in an electrode, good power generation performance under any of low humidity and high humidity conditions, and also excellent durability of power generation.
The electrode catalyst layer of the invention contains catalyst particles, an ion exchange resin and a water repellent agent, wherein said water repellent agent contains at least one kind selected from the group consisting of (A) a fluorine-containing copolymer having a structure unit derived from a polyfluoroalkyl-containing (meth)acrylate and (B) a fluorine-containing copolymer having a specific structure unit derived from a fluorine-containing olefin monomer and a specific structure unit derived from a vinyl ether monomer.