Lactone compounds of formula (1) are novel and useful as monomers to form base resins for use in chemically amplified resist compositions adapted for micropatterning lithography.
Letter k is 0 or 1 and m is an integer of 1-8.
公式(1)的内酯化合物是新颖的,可作为单体形成基础
树脂,用于
化学增强型抗蚀剂组合物,适用于微图案制造光刻。字母k为0或1,m是1-8的整数。