The synthesis of trimethoxy-, trifluoro-, trihydrido-, and hydrido(phenyl)chlorosilanes, and of hydrido(phenyl)silyltriflates bearing an additional 2-(dimethylphosphinomethyl)phenyl- or a 2-(methylthiomethyl)phenyl substituent is described. The coordination of the phosphorus and sulfur donor in the aryl side chain to the silicon center is discussed on the basis of NMR spectroscopic investigations.