A monomer having a plurality of tertiary alcoholic hydroxyl groups is provided. A useful polymer is obtained by polymerizing the monomer. From a resist composition comprising the polymer, a negative pattern which is insoluble in alkaline developer and has high etch resistance is formed at a high resolution.
提供一种具有多个
三级醇羟基的单体。通过聚合这种单体可以获得一种有用的聚合物。从包含该聚合物的抗蚀组合物中,可以形成一种在高分辨率下不溶于碱性显影剂且具有高蚀刻抵抗力的负图案。