[EN] MYOSIN LIGHT CHAIN PHOSPHATASE INHIBITORS<br/>[FR] INHIBITEURS DE PHOSPHATASE DE CHAÎNE LÉGÈRE DE MYOSINE
申请人:UNIV GEORGETOWN
公开号:WO2009146013A1
公开(公告)日:2009-12-03
Novel myosin light chain phosphatase inhibitors, compositions containing them, methods of making and using them, and methods of using fluorescent myosin light chain phosphatase inhibitors are described.
Modular Synthesis of Phthalaldehyde Derivatives Enabling Access to Photoacid Generator-Bound Self-Immolative Polymer Resists with Next-Generation Photolithographic Properties
作者:Jingyuan Deng、Sean Bailey、Shaoyi Jiang、Christopher K. Ober
DOI:10.1021/jacs.2c08202
日期:2022.10.26
The resolution, line edge roughness, and sensitivity (RLS) trade-off has fundamentally limited the lithographic performance of chemically amplifiedresists. Production of next-generation transistors using extreme ultraviolet (EUV) lithography depends on a solution to this problem. A resist that simultaneously increases the effective reaction radius of its photogenerated acids while limiting their diffusion