FILM FORMING MATERIAL, COMPOSITION FOR FILM FORMATION FOR LITHOGRAPHY, MATERIAL FOR OPTICAL COMPONENT FORMATION, RESIST COMPOSITION, RESIST PATTERN FORMATION METHOD, PERMANENT FILM FOR RESIST, RADIATION-SENSITIVE COMPOSITION, METHOD FOR PRODUCING AMORPHOUS FILM, UNDERLAYER FILM FORMING MATERIAL FOR LITHOGRAPHY, COMPOSITION FOR UNDERLAYER FILM FORMATION FOR LITHOGRAPHY, METHOD FOR PRODUCING UNDERLAYER FILM FOR LITHOGRAPHY, AND CIRCUIT PATTERN FORMATION METHOD
申请人:Mitsubishi Gas Chemical Company, Inc.
公开号:US20200157060A1
公开(公告)日:2020-05-21
A film forming material containing a triazine-based compound represented by the following formula (1):
wherein R
1
, R
2
, and R
3
each independently represent a hydrogen atom, a linear alkyl group having 1 to 30 carbon atoms and optionally having a substituent, a branched alkyl group having 1 to 30 carbon atoms and optionally having a substituent, a cycloalkyl group having 3 to 30 carbon atoms and optionally having a substituent, an aryl group having 6 to 30 carbon atoms and optionally having a substituent, an alkenyl group having 2 to 30 carbon atoms and optionally having a substituent, an alkoxy group having 1 to 30 carbon atoms and optionally having a substituent, an alkylaryl group having 7 to 30 carbon atoms and optionally having a substituent, an arylalkyl group having 7 to 30 carbon atoms and optionally having a substituent, a hydroxyl group, or a group in which a hydrogen atom of a hydroxyl group is replaced with an acid dissociation group or a crosslinkable reactive group, wherein the alkyl group, the cycloalkyl group, the aryl group, the alkenyl group, the alkoxy group, the alkylaryl group, or the arylalkyl group each optionally contains an ether bond, a ketone bond, an ester bond, or a crosslinkable reactive group; S
1
, S
2
, and S
3
each independently represent a hydrogen atom, a hydroxyl group, a group in which a hydrogen atom of a hydroxyl group is replaced with an acid dissociation group or a crosslinkable reactive group, or an alkoxy group having 1 to 30 carbon atoms; T
1
, T
2
, and T
3
each independently represent a hydrogen atom, a hydroxyl group, an alkyl group having 1 to 30 carbon atoms, or an alkenyl group having 2 to 30 carbon atoms; Y
1
, Y
2
, and Y
3
each independently represent a hydrogen atom, a hydroxyl group, a group in which a hydrogen atom of a hydroxyl group is replaced with an acid dissociation group or a crosslinkable reactive group, an alkyl, alkoxy, alkoxycarbonyl or arylalkyl group having 1 to 30 carbon atoms, or an alkenyl group having 2 to 30 carbon atoms; E
1
, E
2
, and E
3
each independently represent a single bond, —O—, —CH
2
O—, —COO—, or —NH—; and each P independently represents an integer of 0 to 1.
一种含有以下式子(1)所表示的三嗪基化合物的成膜材料:
式中,R1、R2和R3各自独立地表示氢原子、具有1至30个碳原子的线性烷基基团,可选地具有取代基、具有1至30个碳原子的支链烷基基团,可选地具有取代基、具有3至30个碳原子的环烷基基团,可选地具有取代基、具有6至30个碳原子的芳基基团,可选地具有取代基、具有2至30个碳原子的烯基基团,可选地具有取代基、具有1至30个碳原子的烷氧基团,可选地具有取代基、具有7至30个碳原子的烷基芳基基团,可选地具有取代基、具有7至30个碳原子的芳基烷基基团,可选地具有取代基、羟基或羟基的氢原子被酸解离基团或可交联反应基团所取代的基团,其中烷基基团、环烷基基团、芳基基团、烯基基团、烷氧基团、烷基芳基基团或芳基烷基基团各自可选地包含醚键、酮键、酯键或可交联反应基团;S1、S2和S3各自独立地表示氢原子、羟基、羟基的氢原子被酸解离基团或可交联反应基团或具有1至30个碳原子的烷氧基团;T1、T2和T3各自独立地表示氢原子、羟基、具有1至30个碳原子的烷基或具有2至30个碳原子的烯基基团;Y1、Y2和Y3各自独立地表示氢原子、羟基、羟基的氢原子被酸解离基团或可交联反应基团、具有1至30个碳原子的烷基、烷氧基、烷氧羰基或芳基烷基基团或具有2至30个碳原子的烯基基团;E1、E2和E3各自独立地表示单键、-O-、-CH2O-、-COO-或-NH-;每个P独立地表示0至1的整数。