Resists sensitive to UV, electron beam and x-ray radiation with positive or negative tone upon proper choice of a developer are formulated from a polymer having recurrent pendant groups such as tert-butyl ester or tert-butyl carbonates that undergo efficient acidolysis with concomitant changes in polarity (solubility) together with a photoinitiator which generates acid upon radiolysis. A sensitizer component that alters wavelength sensitivity may also be added.
对紫外线、电子束和 X 射线辐射敏感的抗蚀剂在适当选择显影剂后可产生正或负的色调,这种抗蚀剂是由一种具有重复悬垂基团(如叔丁酯或叔丁基
碳酸酯)的聚合物与一种在辐射分解时产生酸的光
引发剂配制而成。此外,还可添加一种可改变波长敏感性的敏化剂成分。