Acid generator compounds are provided that are particularly useful as photoresist composition components. Preferred acid generators include cyclic sulfonium compounds that comprise a covalently linked acid-labile group.
IONIC COMPOUND, COMPOSITION, CURED MATERIAL, HYDROGEL AND OPHTHALMIC LENS
申请人:Satake Kohsuke
公开号:US20130202551A1
公开(公告)日:2013-08-08
An ionic compound capable of providing a cured material having superior antibacterial property and oxygen permeability, and a composition containing the ionic compound, and a cured material, a hydro gel and an ophthalmic lens which have long-term sustainable antibacterial property and superior oxygen permeability. The ionic compound is represented by the following formula (1):
In formula (1), P represents a polymerizable functional group. Q
+
represents a cationic group: Z represents an n-valent siloxanyl group in which the total atomic weight of a group of constituent atoms is no less than 70 and no greater than 1,000; X
m−
represents an m-valent anion; and n is an integer of 1 to 10, where provided that n is no less than 2, a plurality of P3 and Q
+
3 are each independently as defined above.
ACID GENERATOR COMPOUNDS AND PHOTORESISTS COMPRISING SAME
申请人:Rohm and Haas Electronic Materials LLC
公开号:US20160347709A1
公开(公告)日:2016-12-01
Acid generator compounds are provided that are particularly useful as a photoresist composition component. In one preferred aspect, acid generators are provided that comprise one or more hydrophilic moieties.
PHOTOBASE GENERATORS AND PHOTORESIST COMPOSITIONS COMPRISING SAME
申请人:Rohm and Haas Electronic Materials Korea Ltd.
公开号:US20160334703A1
公开(公告)日:2016-11-17
New photobase generators suitable for use in photoresists are provided that correspond to Formula (I):
X
1
—R
1
—O—C(═O)N(R
2
)R
3
(I)
wherein X
1
is an optionally substituted aromatic group; R
1
is a linker; and R
2
and R
3
are the same or different optionally substituted linear, branched or cyclic aliphatic group or an optionally substituted aromatic group, wherein at least one of R
2
and R
3
is an optionally substituted branched alkyl group having 4 or more carbon atoms.
COATING COMPOSITION FOR USE WITH AN OVERCOATED PHOTORESIST
申请人:Rohm and Haas Electronic Materials LLC
公开号:US20170059991A1
公开(公告)日:2017-03-02
Organic coating compositions, particularly antireflective coating compositions for use with an overcoated photoresist, are provided that comprise that comprise a crosslinker component that comprises a structure of the following Formula (I):