(Meth)acrylate, raw material alcohol for the (meth)acrylate, method of producing the (meth)acrylate and the alcohol, polymer produced by polymerizing the (meth)acrylate, chemically amplified resist composition, and method of the formation of a pattern
申请人:Kamon Yoshihiro
公开号:US20050113538A1
公开(公告)日:2005-05-26
The (meth)acrylate of the present invention is represented by the following formula (1). The (meth)acrylate can be produced by first producing a lactone by reducing an addition product obtained by the Diels-Alder reaction between 1,3-diene and maleic anhydride, and then hydrating the lactone to produce an alcohol followed by (meth)acrylation of the alcohol. A polymer produced by (co)polymerizing a monomer composition comprising the (meth)acrylate of the present invention is excellent in transparency, dry etching resistance, and solubility in organic solvents, and so it is preferably used as a resin for a chemically amplified resist composition.
wherein each of R
1
, R
2
, R
3
and R
4
represents a hydrogen atom, a methyl group or an ethyl group; either one of X
1
or X
2
represents a (meth)acryloyloxy group and the other represents a hydrogen atom; both A
1
and A
2
represent hydrogen atoms, or A
1
and A
2
form —O—, —CH
2
— or —CH
2
CH
2
—.
本发明的(甲基)丙烯酸酯由以下公式(1)表示。可以通过首先通过还原1,3-二烯和马来酸酐之间的Diels-Alder反应得到的加成产物来生产内酯,然后使内酯水合生成醇,接着对醇进行(甲基)丙烯化来生产(甲基)丙烯酸酯。通过共聚或聚合包含本发明的(甲基)丙烯酸酯的单体组成的聚合物在透明度,干法蚀刻抵抗力和有机溶剂溶解性方面表现出色,因此最好用作化学增感抗蚀剂组成物的树脂。
其中,R1、R2、R3和R4中的每一个代表氢原子、甲基基团或乙基基团;X1或X2中的任意一个代表(甲基)丙烯酰氧基,另一个代表氢原子;A1和A2都代表氢原子,或者A1和A2形成-O-,-CH2-或-CH2CH2-。