ACID GENERATORS, SULFONIC ACIDS, SULFONYL HALIDES, AND RADIATION-SENSITIVE RESIN COMPOSITIONS
申请人:JSR Corporation
公开号:EP1600437A1
公开(公告)日:2005-11-30
The invention provides novel acid generators which are unproblematic in combustibility and accumulation inside the human body and can generate acids having high acidities and high boiling points and exhibiting properly short diffusion lengths in resist coating films and which permit the formation of resist patterns excellent smoothness with little dependence on the denseness of a mask pattern; sulfonic acids generated from the acid generators; sulfonyl halides useful as raw material in the synthesis of the acid generators; and radiation-sensitive resin compositions containing the acid generators. The acid generators have structures represented by the general formula (I),
wherein R1 is a monovalent substituent such as alkoxycarbonyl, alkylsulfonyl, or alkoxysulfonyl; R2 to R4 are each hydrogen or alkyl; k is an integer of 0 or above; and n is an integer of 0 to 5. Among the radiation-sensitive resin compositions, a positive one contains a resin having acid-dissociable groups in addition to the above acid generator, while a negative one contains an alkali-soluble resin and a crosslinking agent in addition to the acid generator.
本发明提供了新型酸发生器,这些酸发生器在可燃性和人体内蓄积方面没有问题,并且可以生成具有高酸度和高沸点的酸,在抗蚀剂涂膜中的扩散长度也很短,可以形成光滑度极佳的抗蚀剂图案,对掩膜图案密度的依赖性很小;提供了由酸发生器生成的磺酸;提供了可用作合成酸发生器原料的磺酰卤化物;以及提供了含有酸发生器的辐射敏感树脂组合物。酸生成物具有通式 (I) 所表示的结构、
其中 R1 是单价取代基,如烷氧基羰基、烷基磺酰基或烷氧基磺酰基;R2 至 R4 分别是氢或烷基;k 是 0 或以上的整数;n 是 0 至 5 的整数。在辐射敏感树脂组合物中,正极组合物除上述酸发生剂外,还含有一种具有酸分解基团的树脂,而负极组合物除酸发生剂外,还含有一种碱溶性树脂和一种交联剂。