7-Tert-butoxycarbonyl-2-oxohexahydro-3,5-methano-2H-cyclopenta[b]furane-6-yl Methacrylate | 436853-02-0

• 分子结构分类: 有机化合物 - 脂质和类脂质分子 - 异戊烯醇脂质
• 英文名称: 7-Tert-butoxycarbonyl-2-oxohexahydro-3,5-methano-2H-cyclopenta[b]furane-6-yl Methacrylate
• 英文别名: tert-butyl 2-(2-methylprop-2-enoyloxy)-5-oxo-4-oxatricyclo[4.2.1.03,7]nonane-9-carboxylate
• CAS: 436853-02-0
• 化学式: C₁₇H₂₂O₆
• 分子量: 322.358
• InChiKey: JVLVUAGJKKJQND-UHFFFAOYSA-N

计算性质

• 辛醇/水分配系数(LogP)：
  2.1
• 重原子数：
  23
• 可旋转键数：
  6
• 环数：
  3.0
• sp3杂化的碳原子比例：
  0.71
• 拓扑面积：
  78.9
• 氢给体数：
  0
• 氢受体数：
  6

反应信息

• 作为反应物：
  描述：

  7-Tert-butoxycarbonyl-2-oxohexahydro-3,5-methano-2H-cyclopenta[b]furane-6-yl Methacrylate 在 甲酸 作用下， 以 甲酸 为溶剂， 反应 16.0h， 以obtained in Synthesis Example 1-1-1的产率得到6-Methacryloyloxy-2-oxohexahydro-3,5-methano-2H-cyclopenta[b]furane-7-carboxylic Acid
  参考文献：
  名称：

  Sulfonium salt, polymer, chemically amplified resist composition using said polymer, and resist patterning process

  摘要：

  公开了一种由下列通式（1）所示的磺鎵盐。可以有一种磺鎵盐，能够将产生适当酸度的酸的酸生成单元引入到基础聚合物中，而不会影响与基底的附着；使用所述磺鎵盐的聚合物；使用所述聚合物作为基础聚合物的化学放大型光刻胶组合物；以及使用所述化学放大型光刻胶组合物的成图过程。

  公开号：

  US08835097B2
• 作为产物：
  描述：

  tert-butyl 6-hydroxy-2-oxohexahydro-3,5-methano-2H-cyclopenta[b]furan-7-carboxylate 、 甲基丙烯酰氯 在 三乙胺 作用下， 以 水 、 乙酸乙酯 、 乙腈 为溶剂， 以70%的产率得到7-Tert-butoxycarbonyl-2-oxohexahydro-3,5-methano-2H-cyclopenta[b]furane-6-yl Methacrylate
  参考文献：
  名称：

  SULFONIUM SALT, POLYMER, CHEMICALLY AMPLIFIED RESIST COMPOSITION USING SAID POLYMER, AND RESIST PATTERNING PROCESS

  摘要：

  公开了一种由以下一般式（1）所示的硫銨鹽。可以有一种硫銨鹽，能夠將一個能夠生成具有適當酸度並不損害與基材的粘附性的酸的酸生成單元引入到基聚合物中；使用所述硫銨鹽的聚合物；使用所述聚合物作為基聚合物的化學放大的抗蝕組成物；以及使用所述化學放大的抗蝕組成物的圖案形成過程。

  公开号：

  US20120308920A1

文献信息

• MONOMER HAVING N-ACYL CARBAMOYL GROUP AND LACTONE SKELETON, AND POLYMERIC COMPOUND
  申请人：DAICEL CORPORATION

  公开号：US20160060374A1

  公开（公告）日：2016-03-03

  Disclosed is a monomer containing an N-acylcarbamoyl group and a lactone skeleton. The monomer is exemplified by Formula (1): where R a is selected typically from hydrogen and C 1 -C 6 alkyl; R 1 is, independently in each occurrence, selected typically from halogen and optionally halogenated C 1 -C 6 alkyl; “A” is selected from C 1 -C 6 alkylene, oxygen, sulfur, and non-bond; m represents an integer of 0 to 8; X represents, independently in each occurrence, specific N-acylcarbamoyl; n represents an integer of 1 to 9; and Y represents a C 1 -C 6 divalent organic group.

  揭示了一种含有N-酰基氨酰基基团和内酯骨架的单体。该单体以式(1)为例，其中R通常选择自氢和C1-C6烷基；R1在每次出现时，通常选择自卤素和可选择卤代的C1-C6烷基；“A”选择自C1-C6亚烷基、氧、硫和非键合；m表示0到8的整数；X在每次出现时独立选择特定的N-酰基氨酰基；n表示1到9的整数；Y代表C1-C6二价有机基团。
• CARBOXYL-CONTAINING LACTONE COMPOUND, POLYMER, RESIST COMPOSITION, AND PATTERNING PROCESS
  申请人：SHINACHI Satoshi

  公开号：US20090274984A1

  公开（公告）日：2009-11-05

  Carboxyl-containing lactone compounds having formula (1) are novel wherein R 1 is H, F, methyl or trifluoromethyl, R 2 and R 3 are H or monovalent hydrocarbon groups, or R 2 and R 3 may together form an aliphatic ring, W is CH 2 , O or S, k 1 is an integer of 0 to 4, and k 2 is 0 or 1. They are useful as monomers to produce polymers which are transparent to radiation ≦500 nm. Radiation-sensitive resist compositions comprising the polymers as base resin exhibit excellent properties including resolution, LER, pattern density dependency and exposure margin.

  具有式（1）的含羧基内酯化合物是新型的，其中R1为H、F、甲基或三氟甲基，R2和R3为H或一价碳氢基团，或者R2和R3可以共同形成脂肪环，W为CH2、O或S，k1为0到4的整数，k2为0或1。它们可用作单体，生产透射辐射≦500nm的聚合物。以这些聚合物为基础树脂的辐射敏感抗蚀剂组合物具有优异的性能，包括分辨率、LER、图案密度依赖性和曝光余量。
• Unsaturated carboxylic acid hemicacetal ester, polymeric compound and photoresist resin composition
  申请人：Koyama Hiroshi

  公开号：US20060160247A1

  公开（公告）日：2006-07-20

  A polymeric compound having a repeated unit corresponding to an unsaturated carboxylic acid hemiacetal ester represented by the following formula (1); wherein R a is a hydrogen atom, a halogen atom, an alkyl group of carbon number 1 to 6 or a haloalkyl group of carbon number 1 to 6, R b is a hydrocarbon group having a hydrogen atom at a first poison, R c is a hydrogen atom or a hydrocarbon group and R d is an organic group having a cyclic skeleton. This polymeric compound, further, may have a repeated unit corresponding to at least one monomer selected from a monomer having a lactone skeleton, a monomer having a cyclic ketone skeleton, a monomer having an acid anhydride group and a monomer having an imide group [except for a repeated unit corresponding to the said unsaturated carboxylic acid hemiacetal ester] and/or a repeated unit corresponding to at least one monomer selected from a monomer having a hydroxyl group and others. This polymeric compound shows superior acid-eliminating function in case of using as photoresist.

  一种聚合物化合物，其重复单元对应于由以下式（1）表示的不饱和羧酸半缩醛酯： 其中，R为氢原子，卤素原子，碳数为1到6的烷基或碳数为1到6的卤代烷基，Rb为在第一位置具有氢原子的碳氢基，Rc为氢原子或碳氢基，而Rd为具有环状骨架的有机基团。此聚合物化合物还可以具有对应于至少一种单体的重复单元，所述单体具有内酯骨架、环状酮骨架、酸酐基或亚酰胺基[除了对应于所述不饱和羧酸半缩醛酯的重复单元]和/或对应于至少一种具有羟基的单体的重复单元和其他单体。该聚合物化合物在用作光刻胶时表现出优越的酸消除功能。
• Polycyclic Ester Containing Cyano Group and Lactone Skeleton
  申请人：Inoue Keizo

  公开号：US20080319160A1

  公开（公告）日：2008-12-25

  Disclosed is a polycyclic ester containing a cyano group and a lactone skeleton, represented by following Formula (1): wherein R a represents, for example, a hydrogen atom or an alkyl group having one to six carbon atoms which may have a halogen atom; R 1 s each represent, for example, a halogen atom or an alkyl or haloalkyl group having one to six carbon atoms; “m” is the number of R 1 s; “n” is the number of cyano groups; and CH 2 ═C(R a )COO— group may have either of an endo conformation and an exo conformation. Accordingly, there is provided a novel polycyclic ester containing a cyano group and a lactone skeleton which is useful typically as a monomeric component for highly functional polymers. A polymer, for example, derived from this compound is highly soluble in an organic solvent while remaining stable typically to chemicals and exhibits improved hydrolyzability and/or improved solubility in water after hydrolysis.

  本发明公开了一种含有氰基和内酯骨架的多环酯，其化学式如下（1）所示：其中，R是氢原子或具有1-6个碳原子的烷基基团，该基团可以具有卤原子；R1分别表示卤原子或具有1-6个碳原子的烷基或卤代烷基基团；“m”是R1的数量；“n”是氰基的数量；而CH2═C(Ra)COO—基团可以具有内式构象或外式构象。因此，本发明提供了一种新型的含有氰基和内酯骨架的多环酯，通常可用作高功能聚合物的单体组分。例如，由该化合物衍生的聚合物在有机溶剂中高度溶解，同时在化学上保持稳定，并在水解后表现出改善的水解性和/或改善的水溶性。
• MONOMER HAVING LACTONE SKELETON, POLYMER COMPOUND AND PHOTORESIST COMPOSITION
  申请人：Koyama Hiroshi

  公开号：US20100316954A1

  公开（公告）日：2010-12-16

  Disclosed is a novel monomer having a lactone skeleton, which is useful typically as a monomer component typically for a highly functional polymer, because, when the monomer is applied typically to a resist resin, the resin is satisfactory stable and resistant typically to chemicals, is highly soluble in organic solvents, and has improved hydrolyzability and/or water solubility after hydrolysis. The monomer having a lactone skeleton is represented by following Formula (1), wherein R a represents a hydrogen atom, halogen atom, or substituted or unsubstituted alkyl group having 1 to 6 carbon atoms; R 1 represents a group having a lactone skeleton; and Y represents a bivalent organic group having 1 to 6 carbon atoms.

  本发明涉及一种具有内酯骨架的新单体，通常作为高功能聚合物的单体组分，因为当该单体通常应用于抗蚀树脂时，该树脂通常具有良好的稳定性和耐化学性，高度溶解于有机溶剂，并且在水解后具有改善的水解性和/或水溶性。具有内酯骨架的单体由下式（1）表示，其中R代表氢原子，卤素原子或取代或未取代的1至6个碳原子的烷基基团；R1代表具有内酯骨架的基团；Y代表具有1至6个碳原子的双价有机基团。