ACID-LABILE ESTER MONOMER HAVING SPIROCYCLIC STRUCTURE, POLYMER, RESIST COMPOSITION, AND PATTERNING PROCESS
申请人:Kinsho Takeshi
公开号:US20100304295A1
公开(公告)日:2010-12-02
An acid-labile ester monomer of spirocyclic structure has formula (1) wherein Z is a monovalent group having a polymerizable double bond, X is a divalent group which forms a cyclopentane, cyclohexane or norbornane ring, R
2
is H or monovalent hydrocarbon, R
3
and R
4
are H or monovalent hydrocarbon, or R
3
and R
4
, taken together, stand for a divalent group which forms a cyclopentane or cyclohexane ring, and n is 1 or 2. A polymer obtained from the acid-labile ester monomer has so high reactivity in acid-catalyzed elimination reaction that the polymer may be used to formulate a resist composition having high resolution.
一种酸敏感酯单体具有螺环结构,其化学式如下(1),其中Z是具有可聚合双键的一价基团,X是形成环戊烷、环己烷或诺邦烷环的二价基团,R2是H或一价碳氢基团,R3和R4是H或一价碳氢基团,或者R3和R4一起表示形成环戊烷或环己烷环的二价基团,n为1或2。从酸敏感酯单体获得的聚合物在酸催化消除反应中具有很高的反应性,因此可以用于制备具有高分辨率的抗蚀组合物。